Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)
Plasma produced from molten-tin microdroplets generates extreme ultraviolet light for state-
of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In the future …
of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In the future …
Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography
Extreme ultraviolet (EUV) lithography is currently entering high-volume manufacturing to
enable the continued miniaturization of semiconductor devices. The required EUV light, at …
enable the continued miniaturization of semiconductor devices. The required EUV light, at …
Extreme ultraviolet light from a tin plasma driven by a 2-µm-wavelength laser
An experimental study of laser-produced plasmas is performed by irradiating a planar tin
target by laser pulses, of 4.8 ns duration, produced from a KTP-based 2-µm-wavelength …
target by laser pulses, of 4.8 ns duration, produced from a KTP-based 2-µm-wavelength …
Optimization of extreme ultra-violet light emitted from the CO2 laser-irradiated tin plasmas using 2D radiation hydrodynamic simulations
We studied Extreme Ultra-Violet (EUV) emission characteristics of the 13.5 nm wavelength
from CO_2 laser-irradiated pre-formed tin plasmas using 2D radiation hydrodynamic …
from CO_2 laser-irradiated pre-formed tin plasmas using 2D radiation hydrodynamic …
High-energy ions from Nd: YAG laser ablation of tin microdroplets: comparison between experiment and a single-fluid hydrodynamic model
DJ Hemminga, L Poirier, MM Basko… - Plasma Sources …, 2021 - iopscience.iop.org
We present the results of a joint experimental and theoretical study of plasma expansion
arising from Nd: YAG laser ablation (laser wavelength λ= 1.064 μm) of tin microdroplets in …
arising from Nd: YAG laser ablation (laser wavelength λ= 1.064 μm) of tin microdroplets in …
Characterization of angularly resolved EUV emission from 2-µm-wavelength laser-driven Sn plasmas using preformed liquid disk targets
The emission properties of tin plasmas, produced by the irradiation of preformed liquid tin
targets by several-ns-long 2 µm-wavelength laser pulses, are studied in the extreme …
targets by several-ns-long 2 µm-wavelength laser pulses, are studied in the extreme …
[HTML][HTML] Simulations of plasmas driven by laser wavelengths in the 1.064—10.6 μm range for their characterization as future extreme ultraviolet light sources
DJ Hemminga, OO Versolato, J Sheil - Physics of Plasmas, 2023 - pubs.aip.org
We characterize the properties of extreme ultraviolet (EUV) light source plasmas driven by
laser wavelengths in the λ laser= 1.064− 10.6 μ m range and laser intensities of I laser= 0.5 …
laser wavelengths in the λ laser= 1.064− 10.6 μ m range and laser intensities of I laser= 0.5 …
Characterization of 1- and -wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light
Experimental spectroscopic studies are presented, in a 5.5–25.5 nm extreme-ultraviolet
(EUV) wavelength range, of the light emitted from plasma produced by the irradiation of tin …
(EUV) wavelength range, of the light emitted from plasma produced by the irradiation of tin …
Joint measurement of electron density, temperature, and emission spectrum of Nd: YAG laser-produced tin plasma
Y Pan, K Tomita, A Sunahara, A Sasaki… - Applied Physics …, 2023 - pubs.aip.org
We present the results of joint measurements of electron density ( ne), temperature ( T
e), and emission spectra of an Nd: YAG-driven tin plasma. Collective Thomson scattering …
e), and emission spectra of an Nd: YAG-driven tin plasma. Collective Thomson scattering …
[HTML][HTML] Production of 13.5 nm light with 5% conversion efficiency from 2 μm laser-driven tin microdroplet plasma
We demonstrate the efficient generation of extreme ultraviolet (EUV) light from laser-
produced plasma (LPP) driven by 2 μm wavelength laser light as an alternative for 10 μm …
produced plasma (LPP) driven by 2 μm wavelength laser light as an alternative for 10 μm …