Aspects of this disclosure relate to an acoustic wave device that includes a bulk acoustic
wave resonator and a Lamb wave element implemented on a common substrate. In some …

Acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate
having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, a …

ABSTRACT A bulk acoustic wave (BAW) resonator includes: a plurality of acoustic reflectors
disposed in a substrate; a lower elec trode disposed over the plurality of acoustic reflectors; …

Devices and processes for preparing devices are described for a bulk acoustic wave
resonator. A stack formed over a substrate includes a piezoelectric film element, a first (eg …

Devices and processes for preparing devices are described for a bulk acoustic wave
resonator. A stack includes a first electrode that is coupled to a first side of a piezoelectric …

Acoustic resonator devices, filters, and methods are disclosed. An acoustic resonator
includes a substrate and a lithium niobate (LN) plate having front and back surfaces and a …

Aspects of this disclosure relate to acoustic wave filters that include a Lamb wave resonator
and a second acoustic wave resonator that is a different type of acoustic wave resonator …

A bulk acoustic (BAW) resonator having a multilayer base and method of fabricating the bulk
acoustic resonator is disclosed. A BAW resonator comprises a substrate having a cavity and …

A bulk acoustic wave (BAW) resonator includes a substrate, a stack over the substrate and
including a piezoelectric layer disposed between two electrode layers, and one or more …

Acoustic resonator devices and filters. An acoustic resonator includes a substrate and a
lithium niobate plate. A back surface of the lithium niobate plate faces the substrate. A …