Reactive pulsed laser deposition of low particulate density and epitaxial TiN films on Si (100) for functional oxide integration

S Vura, RK Rai, P Nukala, S Raghavan - Thin Solid Films, 2022 - Elsevier
Abstract Epitaxial TiN films on (100) Si have been realized by reactive pulsed laser
deposition (PLD). Their utility is demonstrated by subsequent growth of epitaxial BaTiO 3 …

[HTML][HTML] Photodiode characteristics of HfO2 thin films prepared by magnetron sputtering

CF Liu, XG Tang, XB Guo, QX Liu, YP Jiang, ZH Tang… - Materials & Design, 2020 - Elsevier
HfO 2 thin film is deposited on p-Si substrates by RF magnetron sputtering apparatus and
annealed at 750° C for 10 min with O 2 atmosphere. Spectral analysis shows that HfO 2 thin …

Contacts in advanced CMOS: History and emerging challenges

C Lavoie, P Adusumilli, AV Carr, JSJ Sweet… - ECS …, 2017 - iopscience.iop.org
Silicide materials used as contacts in CMOS devices have evolved over many technology
nodes. This article traces the often forgotten defectivity related reasons that were the primary …

Interface study of thermally driven chemical kinetics involved in Ti/Si3N4 based metal-substrate assembly by X-ray photoelectron spectroscopy

S Yadav, S Sahoo - Applied Surface Science, 2021 - Elsevier
Diffusion mediated interaction in metal-substrate assembly during high temperature
annealing leads to possible formation of new composite materials. Here, sputtered grown Ti …

Gate-stack optimization of a vertically stacked nanosheet FET for digital/analog/RF applications

S Tayal, S Bhattacharya, J Ajayan, LR Thoutam… - Journal of …, 2022 - Springer
Nanosheet field effect transistors (NS-FET) are a most promising candidate for next-
generation semiconductor devices for sub-7-nm technology nodes. This work explores a two …

Synthesis and kinetics of titanium silicides from photovoltaic industry waste and steelmaking slag for silicon and titanium recovery

Z Chen, Y You, K Morita - ACS Sustainable Chemistry & …, 2018 - ACS Publications
The increasing amount of silicon waste generated from the rapid developing photovoltaic
industry calls for an economical silicon recycling process. The present work proposes a …

Nanosheet FET: A new subthreshold current model caused by interface-trapped-charge and its application for evaluation of subthreshold logic gate

T Chiang - Microelectronics Journal, 2020 - Elsevier
Based on the quasi-3D potential approach, quasi-3D scaling theory, drift-diffusion model,
and equivalent flat-band shift, a new subthreshold current model caused by the interface …

Quantum Teleportation Using Artificial Wormhole: A Mini Review

P Tailor, H Singh, R Priya - 2023 International Conference on …, 2023 - ieeexplore.ieee.org
Teleportation is a new age budding technology that is both ground-breaking and advanced.
Through teleportation, it aims to transmit information across channels without taking the help …

Split replacement metal gate integration

ED Litta, BT Chan, S Demuynck - US Patent 11,348,842, 2022 - Google Patents
(57) ABSTRACT A method for forming a semiconductor device, the method including:
providing a substrate with at least one fin or nanowire; forming a dummy gate; providing …