Over the last two decades, piezoelectric resonant sensors based on micro-
electromechanical systems (MEMS) technologies have been extensively studied as such …

With the development of next-generation wireless communication and sensing technologies,
there is an increasing demand for high-performance and miniaturized resonators …

This paper reports experimental results demonstrating the use of biconvex-edge designs to
enhance the quality factor (Q) in aluminum nitride (AlN)-on-silicon micromechanical …

We report a unique method of using etch-holes to greatly improve the unloaded quality
factor (Q u) of VHF-band low impedance laterally vibrating AlN Thin-film Piezoelectric-on …

Previous work has demonstrated the effectiveness of the biconvex approach in enhancing
the quality factor of piezoelectric resonators. This paper explores biconvex resonators in …

Reference oscillators are crucial hardware components of radio-frequency receiver circuits,
as their performance directly affects the system performance. Especially in GHz applications …

In this paper, a novel vertically arranged double-electrodes A 0 mode Lamb-wave AlN
resonator on SOI substrate with a high electromechanical coupling coefficient and high …

This paper reports the application of high frequency laser Doppler vibrometry to observe the
surface profile of waves at the boundaries of contour mode aluminum nitride (AlN) on silicon …

Aluminum nitride (AlN)-on-Si MEMS resonators operating in Lamb wave modes have found
wide applications for physical sensing and frequency generation. Due to the inherent …

Quality factor (Q) is an extremely important parameter for the practical applications of micro-
electromechanical systems (MEMS) resonators. Single optimization is difficult to achieve the …