Fully monolithic, high-Q, micromechanical signal processors are described. A completely
monolithic high-Q oscillator, fabricated via a combined CMOS plus surface micromachining …

Micromachining and micro-electromechanical system (MEMS) technologies can be used to
produce complex structures, devices and systems on the scale of micrometers. Initially …

Interdigitated finger (comb) structures are demonstrated to be effective for exciting
electrostatically the resonance of polysilicon microstructures parallel to the plane of the …

Surface micromachining is characterized by the fabrication of micromechanical structures
from deposited thin films. Originally employed for integrated circuits, films composed of …

This book on mechanical microsensors is based on a course organized by the Swiss
Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and …

A completely monolithic high-Q oscillator, fabricated via a combined CMOS plus surface
micromachining technology, is described, for which the oscillation frequency is controlled by …

Free-free-beam flexural-mode micromechanical resonators utilizing nonintrusive supports to
achieve measured Qs as high as 8400 at VHF frequencies from 30 to 90 MHz are …

Microelectromechanical filters based on coupled lateral microresonators are demonstrated.
This new class of microelectromechanical systems (MEMS) has potential signal-processing …

A new fabrication methodology that allows self-alignment of a micromechanical structure to
its anchor (s) has been used to achieve vibrating radial-contour mode polysilicon …

With Q's in the tens to hundreds of thousands, micromachined vibrating resonators are
proposed as integrated circuit-compatible tanks for use in the low phase-noise oscillators …