MEMS-based oscillators are an emerging class of highly miniaturized, batch manufacturable
timing devices that can rival the electrical performance of well-established quartz-based …

A micromechanical 13.1-MHz bulk acoustic mode silicon resonator having a high quality
factor (Q= 130 000) and high maximum drive level (P= 0.12 mW at the hysteresis limit) is …

The paper describes the design and implementation of an electronically temperature
compensated reference oscillator based on capacitive silicon micromechanical resonators …

Phase noise in capacitively coupled micro-resonator-based oscillators is investigated. A
detailed analysis of noise mixing mechanisms in the resonator is presented, and the …

In this paper, we present comprehensive analysis of the nonlinearities in a micromechanical
clamped-clamped beam resonator. A nonlinear model which incorporates both mechanical …

A micromechanical 13.1 MHz bulk acoustic mode (BAW) silicon resonator is demonstrated.
The vibration mode can be characterized as a 2-D plate expansion that preserves the …

This paper presents a new phase-noise model for nonlinear microelectromechanical-system
(MEMS) oscillators. Two widely recognized existing phase-noise models, namely, the linear …

Resonant force or displacement sensing based on observing the change in resonant
frequency is attractive because of its relative insensitivity to 1/f noise, high resolution and …

Microelectromechanical beam resonators and arrays are fabricated using a custom low-
temperature complementary-metal-oxide-semiconductor-compatible silicon carbide …

In this work the nonlinear dynamic behaviour under varying temperature conditions of the
resonating beams of a differential resonant accelerometer is studied from the theoretical …