Optical design of MOEMS-based micro-mechatronic modules for applications in spectroscopy
A Tortschanoff, M Kremer, T Sandner… - Next-Generation …, 2014 - spiedigitallibrary.org
One of the important challenges for widespread application of MOEMS devices is to provide
a modular interface for easy handling and accurate driving of the MOEMS elements, in order …
a modular interface for easy handling and accurate driving of the MOEMS elements, in order …