Epitaxial growth of group III-nitride films by pulsed laser deposition and their use in the development of LED devices

G Li, W Wang, W Yang, H Wang - Surface Science Reports, 2015 - Elsevier
Recently, pulsed laser deposition (PLD) technology makes viable the epitaxial growth of
group III-nitrides on thermally active substrates at low temperature. The precursors …

The future for plasma science and technology

KD Weltmann, JF Kolb, M Holub… - Plasma Processes …, 2019 - Wiley Online Library
The application of gas discharge plasmas has assumed an important place in many
manufacturing processes. Plasma methods contribute significantly to the economic …

Thickness-dependent physical and nanomechanical properties of AlxGa1− xN thin films

N Boughrara, Z Benzarti, A Khalfallah… - Materials Science in …, 2022 - Elsevier
A set of undoped Al x Ga 1− x N epilayers with different thicknesses were grown on (0001)
sapphire substrates using metal-organic chemical vapor deposition (MOCVD) technique …

Wafer-level monolithic integration of vertical micro-LEDs on glass

W Guo, H Meng, Y Chen, T Sun… - IEEE Photonics …, 2020 - ieeexplore.ieee.org
In an earlier study micro-LED micro display (<; 1 inch) on silicon CMOS backplane was
demonstrated for augmented reality (AR) applications. Here we report the feasibility of wafer …

High performance of Ga-doped ZnO transparent conductive layers using MOCVD for GaN LED applications

RH Horng, KC Shen, CY Yin, CY Huang, DS Wuu - Optics Express, 2013 - opg.optica.org
High performance of Ga-doped ZnO (GZO) prepared using metalorganic chemical vapor
deposition (MOCVD) was employed in GaN blue light-emitting diodes (LEDs) as transparent …

Application of the evolutionary kinetic Monte Carlo method for the simulation of anisotropic wet etching of sapphire

G Wu, Y Xing, Y Chen, ZF Zhou - Journal of Micromechanics and …, 2021 - iopscience.iop.org
In this paper, the simple, rejection-based kinetic Monte Carlo simulation method is applied
for the approximate simulation of the etch rates and three-dimensional etch structures during …

Pulsed laser deposition of hexagonal GaN-on-Si (100) template for MOCVD applications

KC Shen, MC Jiang, HR Liu, HH Hsueh, YC Kao… - Optics express, 2013 - opg.optica.org
Growth of hexagonal GaN on Si (100) templates via pulsed laser deposition (PLD) was
investigated for the further development of GaN-on-Si technology. The evolution of the GaN …

The model of etch rates of crystallographic planes of sapphire based on step flow mechanism

G Wu, Y Xing - Journal of Microelectromechanical Systems, 2020 - ieeexplore.ieee.org
In this paper, a model of etch rates of crystallographic planes of sapphire based on step flow
mechanism is proposed, which explains the relationship between etch rates of and atomic …

AFM and SEM Study on Crystallographic and Topographical Evolutions of Wet-Etched Patterned Sapphire Substrate (PSS): Part II. Cone-Shaped PSS Etched in …

J Shen, D Zhang, Y Wang, Y Gan - ECS Journal of Solid State …, 2017 - iopscience.iop.org
Here we present a systematic study on crystallographic and topographical evolutions as well
as etching rates of crystallographic planes of cone-shaped patterned sapphire substrate …

Optimization of the Monte Carlo simulation for sapphire in wet etching

G Wu, Y Li, J Qian, X Miao - Coatings, 2023 - mdpi.com
In this paper, the Monte Carlo simulation for sapphire in wet etching is optimized, which
improves the accuracy and efficiency of simulated results. Firstly, an eight-index …