The application of gas discharge plasmas has assumed an important place in many manufacturing processes. Plasma methods contribute significantly to the economic …
N Boughrara, Z Benzarti, A Khalfallah… - Materials Science in …, 2022 - Elsevier
A set of undoped Al x Ga 1− x N epilayers with different thicknesses were grown on (0001) sapphire substrates using metal-organic chemical vapor deposition (MOCVD) technique …
W Guo, H Meng, Y Chen, T Sun… - IEEE Photonics …, 2020 - ieeexplore.ieee.org
In an earlier study micro-LED micro display (<; 1 inch) on silicon CMOS backplane was demonstrated for augmented reality (AR) applications. Here we report the feasibility of wafer …
High performance of Ga-doped ZnO (GZO) prepared using metalorganic chemical vapor deposition (MOCVD) was employed in GaN blue light-emitting diodes (LEDs) as transparent …
G Wu, Y Xing, Y Chen, ZF Zhou - Journal of Micromechanics and …, 2021 - iopscience.iop.org
In this paper, the simple, rejection-based kinetic Monte Carlo simulation method is applied for the approximate simulation of the etch rates and three-dimensional etch structures during …
Growth of hexagonal GaN on Si (100) templates via pulsed laser deposition (PLD) was investigated for the further development of GaN-on-Si technology. The evolution of the GaN …
G Wu, Y Xing - Journal of Microelectromechanical Systems, 2020 - ieeexplore.ieee.org
In this paper, a model of etch rates of crystallographic planes of sapphire based on step flow mechanism is proposed, which explains the relationship between etch rates of and atomic …
J Shen, D Zhang, Y Wang, Y Gan - ECS Journal of Solid State …, 2017 - iopscience.iop.org
Here we present a systematic study on crystallographic and topographical evolutions as well as etching rates of crystallographic planes of cone-shaped patterned sapphire substrate …
G Wu, Y Li, J Qian, X Miao - Coatings, 2023 - mdpi.com
In this paper, the Monte Carlo simulation for sapphire in wet etching is optimized, which improves the accuracy and efficiency of simulated results. Firstly, an eight-index …