Inverse metal-assisted chemical etching produces smooth high aspect ratio InP nanostructures
Creating high aspect ratio (AR) nanostructures by top-down fabrication without surface
damage remains challenging for III–V semiconductors. Here, we demonstrate uniform, array …
damage remains challenging for III–V semiconductors. Here, we demonstrate uniform, array …
Terahertz metamaterials and systems based on rolled-up 3D elements: designs, technological approaches, and properties
VY Prinz, EV Naumova, SV Golod, VA Seleznev… - Scientific reports, 2017 - nature.com
Electromagnetic metamaterials opened the way to extraordinary manipulation of radiation.
Terahertz (THz) and optical metamaterials are usually fabricated by traditional planar …
Terahertz (THz) and optical metamaterials are usually fabricated by traditional planar …
Low threshold current density distributed feedback quantum cascade lasers with deep top gratings
G Xu, A Li, Y Li, L Wei, Y Zhang, C Lin, H Li - Applied physics letters, 2006 - pubs.aip.org
The authors report on pulsed and continuous-wave operation of single mode tunable
distributed feedback quantum cascade lasers at λ∼ 7.7 μ m. A deep top grating and a thin …
distributed feedback quantum cascade lasers at λ∼ 7.7 μ m. A deep top grating and a thin …
Gain enhancement by dielectric horns in the terahertz band
B Andres-Garcia, E Garcia-Munoz… - IEEE transactions on …, 2011 - ieeexplore.ieee.org
A new geometry for the design of antennas in the Terahertz band is presented. The structure
is based on a horn antenna etched in the substrate and fed with a planar printed antenna …
is based on a horn antenna etched in the substrate and fed with a planar printed antenna …
Efficient membrane grating couplers on InP
We demonstrate an efficient coupler on InP using an etched grating on a suspended
InGaAsP membrane. We measure a peak coupling efficiency of 40%(- 4 dB) between a …
InGaAsP membrane. We measure a peak coupling efficiency of 40%(- 4 dB) between a …
Anisotropic wet etching of a novel micro-texture structure for an Al/n-Si/Al metal–semiconductor–metal photodetector fabrication
K Suttijalern, S Niemcharoen - Journal of Micromechanics and …, 2021 - iopscience.iop.org
Micro-electro-mechanical system fabrication involves molding on a single substrate.
Chemical wet etching is common in these systems because it can provide a very high etch …
Chemical wet etching is common in these systems because it can provide a very high etch …
Micromachining of mesa and pyramidal-shaped objects in (1 0 0) InP substrates
P Eliáš, J Martaus, J Šoltýs, I Kostič - Journal of Micromechanics …, 2005 - iopscience.iop.org
Generally oriented mesas and pyramidal-shaped objects were patterned in (1 0 0) InP
substrate by etching in 3HCl: 1H 3 PO 4 at (16±0.05) C through convex InGaAs mask …
substrate by etching in 3HCl: 1H 3 PO 4 at (16±0.05) C through convex InGaAs mask …
Conformal AZ5214-E resist deposition on patterned (1 0 0) InP substrates
P Eliáš, D Gregušová, J Martaus… - … of Micromechanics and …, 2005 - iopscience.iop.org
A draping technique was studied to deposit thin, visco-elastic AZ5214-E resist layers from a
water surface over planar and patterned substrates. A visco-elastic AZ5214-E layer forms on …
water surface over planar and patterned substrates. A visco-elastic AZ5214-E layer forms on …
[图书][B] Triple-heterojunction (3-HJ) TFETs Design and Fabrication for Low Power Logic
HY Tseng - 2021 - search.proquest.com
Power/heat density becomes excessive in VLSI. Supply voltage in the current 7/10 nm
process has been scaled to 0.7 V for logic devices to reduce dynamic power loss (P …
process has been scaled to 0.7 V for logic devices to reduce dynamic power loss (P …
Enabling fabrication technologies for planar waveguide devices
B Lamontagne - Optical Waveguides, 2018 - taylorfrancis.com
This chapter covers the fundamental fabrication steps for making passive planar
waveguides and discusses some issues and challenges. lt discusses the three main …
waveguides and discusses some issues and challenges. lt discusses the three main …