Atomic layer deposition of ZnO: a review

T Tynell, M Karppinen - Semiconductor Science and Technology, 2014 - iopscience.iop.org
Due to the unique set of properties possessed by ZnO, thin films of ZnO have received more
and more interest in the last 20 years as a potential material for applications such as thin-film …

Atomic layer deposition of conductive and semiconductive oxides

B Macco, WMM Kessels - Applied Physics Reviews, 2022 - pubs.aip.org
Conductive and semiconductive oxides constitute a class of materials of which the electrical
conductivity and optical transparency can be modulated through material design (eg, doping …

Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review

AJM Mackus, JR Schneider, C MacIsaac… - Chemistry of …, 2018 - ACS Publications
In the past decade, atomic layer deposition (ALD) has become an important thin film
deposition technique for applications in nanoelectronics, catalysis, and other areas due to its …

Co‐optimization of SnS absorber and Zn (O, S) buffer materials for improved solar cells

HH Park, R Heasley, L Sun… - Progress in …, 2015 - Wiley Online Library
Thin‐film solar cells consisting of earth‐abundant and non‐toxic materials were made from
pulsed chemical vapor deposition (pulsed‐CVD) of SnS as the p‐type absorber layer and …

Comprehensive review on multiple mixed-anion ligands, physicochemical performances and application prospects in metal oxysulfides

J jing Xu, K Wu - Coordination Chemistry Reviews, 2023 - Elsevier
Oxysulfides, as one type of important mixed-anion inorganic functional systems, possess the
coexistence of two different anions (O 2− and S 2−) in their crystal structures and could be …

Metal oxysulfides: from bulk compounds to nanomaterials

C Larquet, S Carenco - Frontiers in Chemistry, 2020 - frontiersin.org
This review summarizes the syntheses and applications of metal oxysulfides. Bulk
compounds of rare earth and transition metals are discussed in the section Introduction …

Atomic layer deposition: an enabling technology for the growth of functional nanoscale semiconductors

N Biyikli, A Haider - Semiconductor Science and Technology, 2017 - iopscience.iop.org
In this paper, we present the progress in the growth of nanoscale semiconductors grown via
atomic layer deposition (ALD). After the adoption by semiconductor chip industry, ALD …

Band alignment of SnS/Zn (O, S) heterojunctions in SnS thin film solar cells

L Sun, R Haight, P Sinsermsuksakul, S Bok Kim… - Applied Physics …, 2013 - pubs.aip.org
Band alignment is critical to the performance of heterojunction thin film solar cells. In this
letter, we report band alignment studies of SnS/Zn (O, S) heterojunctions with various …

Conversion reactions in atomic layer processing with emphasis on ZnO conversion to Al2O3 by trimethylaluminum

TJ Myers, AM Cano, DK Lancaster… - Journal of Vacuum …, 2021 - pubs.aip.org
Atomic layer processing such as atomic layer deposition (ALD) and thermal atomic layer
etching (ALE) is usually described in terms of sequential, self-limiting surface reactions. This …

Thin film characterization of zinc tin oxide deposited by thermal atomic layer deposition

MN Mullings, C Hägglund, JT Tanskanen, Y Yee… - Thin Solid Films, 2014 - Elsevier
Zinc tin oxide (ZTO) thin films are of interest for many applications, including transparent
conducting oxides and buffer layers in thin film solar cells. In this work, the ability of atomic …