Controlled generation of pulse-modulated RF plasmas for materials processing

R Ye, T Ishigaki, T Sakuta - Plasma Sources Science and …, 2005 - iopscience.iop.org
Pulse-modulated radio frequency (RF) inductively coupled plasmas for materials processing
applications were generated using a voltage-control-type power source, and the operating …

Modeling of an induction plasma under transient turbulent flow conditions

R Ye, T Ishigaki, MI Boulos - Journal of applied physics, 2004 - pubs.aip.org
A renormalization group (RNG) k-ε turbulence model was employed to investigate the role of
turbulence for the transient behavior of the radio frequency induction plasma discharge …

Extinguishing phenomenon and critical discharge boundaries of argon and molecular-gas-seeded argon pulse-modulated induction thermal plasmas

MM Hossain, Y Tanaka, T Sakuta - Plasma Sources Science and …, 2002 - iopscience.iop.org
A stable discharge region of pulse modulated induction thermal plasma at atmospheric
pressure has been determined in terms of the duty factor (DF) and the shimmer current level …

Dynamic responses of Ar–CO2 and Ar–N2 induction thermal plasmas in pulse amplitude modulation approach

MM Hossain, Y Tanaka, T Sakuta - Thin Solid Films, 2003 - Elsevier
Solving a two-dimensional LTE (Local Thermodynamic Equilibrium) code, simulation of Ar–
CO2 and Ar–N2 PMITP (Pulse Modulated Induction Thermal Plasma) has been carried out …

Nonequilibrated situations of pulse modulated Ar–H2 and Ar–N2 thermal plasmas at atmospheric pressure

KC Paul, T Ishigaki, J Mostaghimi… - Journal of applied physics, 2003 - pubs.aip.org
Due to its high enthalpy and chemical reactivity, thermal plasmas have been the subject of
considerable research over the last four decades and are currently employed in many …

Transient nature of argon and molecular gas-seeded argon inductive thermal plasmas in pulse amplitude modulation approach

H MM, Y Tanaka, T Sakuta - IEEJ Transactions on Power and Energy, 2003 - jstage.jst.go.jp
AI—N2, and Alf-02 as working gases (1001er argon and 2.51 pm molecular gas). Simulation
has been carried out using a two-dimensional local thermodynamic equilibrium (LTE) code …

Modeling of transient nonequilibrium phenomena in an inductively coupled plasma under pulsed power conditions

R Ye, T Ishigaki - Journal of applied physics, 2005 - pubs.aip.org
A time-dependent two-temperature model is developed to simulate the behavior of an argon
radio frequency plasma under transient nonequilibrium conditions, with emphasis to shed …

Transient behavior of current modulated 2-T inductively coupled plasma

KC Paul - IEEE transactions on plasma science, 2004 - ieeexplore.ieee.org
Time-dependent thermal plasmas are not in an equilibrium condition even if they are
operated at a very high pressure. Therefore, nonequilibrium modeling is required in order to …

Voltage Excitation in Coil Rings Using Magnetically Coupled Inductor/Load For Axisymmetric Geometry

D Rochette, S Clain, R Touzani - IEEE transactions on power …, 2013 - ieeexplore.ieee.org
We present a method for solving eddy current problems for axisymmetric configurations of a
simply connected induction coil where voltage excitation in coil rings is prescribed and the …

Fundamental study and applications of pulse-modulated induction thermal plasma

MM Hossain - 2003 - kanazawa-u.repo.nii.ac.jp
ABSTRACT A promising new method (pulse-modulation) for induction plasma discharge
has been described. The pulse-modulated induction thermal plasma (PMITP) has been …