Modeling and control of piezo-actuated nanopositioning stages: A survey

GY Gu, LM Zhu, CY Su, H Ding… - IEEE Transactions on …, 2014 - ieeexplore.ieee.org
Piezo-actuated stages have become more and more promising in nanopositioning
applications due to the excellent advantages of the fast response time, large mechanical …

Piezo-actuated smart mechatronic systems: Nonlinear modeling, identification, and control

Z Yuan, S Zhou, Z Zhang, Z Xiao, C Hong… - … Systems and Signal …, 2024 - Elsevier
Precise actuation is a widely utilized technology in the realm of high-end equipment.
Piezoelectric actuators (PEAs) stand out due to their exceptional attributes, including high …

High-speed multiresolution scanning probe microscopy based on Lissajous scan trajectories

T Tuma, J Lygeros, V Kartik, A Sebastian… - …, 2012 - iopscience.iop.org
A novel scan trajectory for high-speed scanning probe microscopy is presented in which the
probe follows a two-dimensional Lissajous pattern. The Lissajous pattern is generated by …

High-speed cycloid-scan atomic force microscopy

YK Yong, SOR Moheimani, IR Petersen - Nanotechnology, 2010 - iopscience.iop.org
A key hurdle in achieving high scan speeds in atomic force microscopes is that the probe is
required to be scanned over the sample in a zig-zag raster pattern. The fast axis of the AFM …

A new scanning method for fast atomic force microscopy

IA Mahmood, SOR Moheimani… - IEEE Transactions on …, 2009 - ieeexplore.ieee.org
In recent years, the atomic force microscope (AFM) has become an important tool in
nanotechnology research. It was first conceived to generate 3-D images of conducting as …

Modeling and identification of piezoelectric-actuated stages cascading hysteresis nonlinearity with linear dynamics

GY Gu, CX Li, LM Zhu, CY Su - IEEE/ASME Transactions on …, 2015 - ieeexplore.ieee.org
In this paper, we propose a new modeling and identification approach for piezoelectric-
actuated stages cascading hysteresis nonlinearity with linear dynamics, which is described …

Fast spiral-scan atomic force microscopy

IA Mahmood, SOR Moheimani - Nanotechnology, 2009 - iopscience.iop.org
In this paper, we describe a new scanning technique for fast atomic force microscopy. In this
method, the sample is scanned in a spiral pattern instead of the well established raster …

Model-based framework for multi-axial real-time hybrid simulation testing

GA Fermandois, BF Spencer - Earthquake Engineering and Engineering …, 2017 - Springer
Real-time hybrid simulation is an efficient and cost-effective dynamic testing technique for
performance evaluation of structural systems subjected to earthquake loading with rate …

High-performance control of fast tool servos with robust disturbance observer and modified H∞ control

WW Huang, P Guo, C Hu, LM Zhu - Mechatronics, 2022 - Elsevier
Fast tool servo (FTS) is an effective technique for the generation of complicated surfaces in
modern precision manufacture industry. In this paper, a novel three-degree-of-freedom (3 …

Improvement in the imaging performance of atomic force microscopy: A survey

MS Rana, HR Pota, IR Petersen - IEEE Transactions on …, 2016 - ieeexplore.ieee.org
Nanotechnology is the branch of science which deals with the manipulation of matters at an
extremely high resolution down to the atomic level. In recent years, atomic force microscopy …