Y Yoshida, A Shimomura, S Yurika - US Patent 8,431,451, 2013 - Google Patents
2004.0056332 A1 3, 2004 Bachrach et all 2008/0318367 A1 12/2008 Shimomura et al. 2004, OO61176 A1 4, 2004 E. e al 2009, 0004821 A1 1/2009 Shimomura et al …
AJ Lochtefeld, TA Langdo, R Hammond… - US Patent …, 2006 - Google Patents
5,166,084 A 11, 1992 Pfester 6,033,995 A 3, 2000 Muller 5,177,583 A 1/1993 Endo et al. 6,058,044 A 5/2000 Sugiura et al. 5,202,284 A 4, 1993 Kamins et al. 6,059,895 A 5, 2000 …
MT Currie - US Patent 7,335,545, 2008 - Google Patents
US7335545B2 - Control of strain in device layers by prevention of relaxation - Google Patents US7335545B2 - Control of strain in device layers by prevention of relaxation - Google Patents …
MT Currie - US Patent 7,307,273, 2007 - Google Patents
US PATENT DOCUMENTS 6,096,590 A 8, 2000 Chan et al. 6,103,559 A 8, 2000 Gardner et al. 5,212,110 A 5, 1993 Pfiester et al. 6,103,597 A 8/2000 Aspar et al. 5,221,413 A 6, 1993 …
M Currie - US Patent App. 11/000,566, 2006 - Google Patents
US20060113603A1 - Hybrid semiconductor-on-insulator structures and related methods - Google Patents US20060113603A1 - Hybrid semiconductor-on-insulator structures and related …
E Fitzgerald, M Currie - US Patent 7,060,632, 2006 - Google Patents
Methods for fabricating multi-layer semiconductor struc tures including strained material layers using a minimum number of process tools and under conditions optimized for each …
M Currie - US Patent App. 11/001,166, 2006 - Google Patents
US20060113605A1 - Hybrid fin field-effect transistor structures and related methods - Google Patents US20060113605A1 - Hybrid fin field-effect transistor structures and related …