Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …

This paper describes two surface micromachining processes, ie, one using a wet-etch
release and the other using a dry-etch release, to create deformable membrane mirrors …

Deformable membrane mirrors are promising MOEMS devices for focus control and
aberration correction in vital microscopy, offering high speed focus adjustment in an optical …

Here, we introduce ultrafast tunable MEMS mirrors consisting of a miniature circular mirrored
membrane, which can be electrostatically actuated to change the mirror curvature at …

SU8-2002 deformable membrane mirrors for primary focus control and compensation of
focus-induced spherical aberration have been fabricated using a surface micromachining …

This paper describes deformable membrane mirrors designed for focus control and
aberration compensation in vital microscopy and shows microscope images obtained using …

Micro-electro-mechanical systems deformable-membrane mirrors provide a means of focus
control and attendant spherical aberration correction for miniaturized imaging systems. The …

We have built 1 mm circular and 1 mm× 1.4 mm elliptical surface micro-machined SU-8
2002 deformable mirrors for focus control. The SU-8 2002 membrane layers are 2.25 μm …

Here, we introduce ultrafast tunable MEMS mirrors consisting of a miniature circular mirrored
membrane, which can be electrostatically actuated to change the mirror curvature at …