Linear parametric amplification/attenuation for MEMS vibratory gyroscopes based on triangular area-varying capacitors
X Zheng, H Wu, Y Lin, Z Ma, Z Jin - Journal of Micromechanics …, 2020 - iopscience.iop.org
This paper presents the linear parametric resonance for MEMS vibratory gyroscopes using
triangular area-varying capacitors. Compared to parametric resonance using gap-varying …
triangular area-varying capacitors. Compared to parametric resonance using gap-varying …
Origami-like 3-D folded MEMS approach for miniature inertial measurement unit
A Efimovskaya, YW Lin… - Journal of …, 2017 - ieeexplore.ieee.org
This paper presents a miniature 50 mm 3 inertial measurement unit (IMU) implemented
using a folded microelectromechanical systems (MEMS) process. The approach is based on …
using a folded microelectromechanical systems (MEMS) process. The approach is based on …
Double-sided process for MEMS SOI sensors with deep vertical thru-wafer interconnects
A Efimovskaya, YW Lin… - Journal of …, 2018 - ieeexplore.ieee.org
This paper reports an approach for co-fabrication of silicon-on-insulator (SOI) sensors with
low-resistance vertical electrical interconnects in thick (up to 600 μm) wafers. The thru-wafer …
low-resistance vertical electrical interconnects in thick (up to 600 μm) wafers. The thru-wafer …