X Li, Y Yuan, C Jin, X Li,
X Yu,
B Chen… - … Conference on IC …, 2024 - ieeexplore.ieee.org
We report an integration and comprehensive study of the ozone SiO 2/HfO 2 interfacial layer
(IL) on Hf 0.5 Zr 0.5 O 2 (HZO) ferroelectric field-effect transistors (FeFETs). HZO FeFET with …