Lilliputian techniques for measuring the mechanical response of microscale specimens are
being developed to characterize the performance and reliability of microelectromechanical …

Abstract Miniaturized Tensile Test (MTT), as an important type of Small Specimen Test
Technology (SSTT), has gained increasing attentions in the nuclear industry and other …

Why write another book on mechanics? There are, after all, a number of excellent texts that
describe in great detail the way classical solids behave when acted upon by static and time …

A new tensile tester using an electrostatic-force grip was developed to evaluate the tensile
strength and the reliability of thin-film materials. The tester was constructed in a scanning …

New techniques and procedures are described that enable one to measure the mechanical
properties of polysilicon films that are 3.5/spl mu/m thick. Polysilicon is deposited onto a …

Where conventional testing and inspection techniques fail at the micro-scale, optical
techniques provide a fast, robust, and relatively inexpensive alternative for investigating the …

M-TEST, an electrostatic pull-in approach for the in-situ mechanical property measurements
of microelectromechanical systems (MEMS), is used to extract the Young's modulus and …

The microscopic mechanical devices in microelectromechanical systems (MEMS) use
materials such as silicon and many other thin films, which had not previously been …

The microstructure of polysilicon specimens of varying size was examined and tensile tests
were conducted to determine if the measured modulus and strength depend on the size of …

The continuing trend of miniaturizing materials in many modern technological applications
has led to a strong demand for understanding the complex mechanical properties of …