We discuss a concept of a pointlike source of extreme-ultraviolet (EUV) light based on a
nonequilibrium microwave discharge in an expanding jet of dense xenon plasma with …

We report on the first direct demonstration of the possibility to generate extreme ultraviolet
(EUV) radiation with a freely expanding jet of dense plasma with multiply charged ions …

An examination of the influence of target composition and viewing angle on the extreme
ultraviolet spectra of laser produced plasmas formed from tin and tin doped planar targets is …

We consider a laser discharge in xenon jet as a source of extreme ultraviolet (EUV)-light. For
realistic plasma parameters, it is shown that the plasma with multiply charged ions, initially …

Abstract The 4 p 6 4 d−(4 p 6 5 p+ 4 p 6 4 f+ 4 p 5 4 d 2) transitions in the spectra of In XIII-Sn
XIV and the 4 p 6 4 d 2−(4 p 6 4 d 5 p+ 4 p 6 4 d 4 f+ 4 p 5 4 d 3) transitions in the spectra of …

Xenon spectra involving emission from ion species of Xe7 to Xe12 were analyzed for a
plasma focus discharge developed for extreme ultraviolet lithography. Low and higher …

Extreme-ultraviolet spectra of xenon ions have been recorded in the 4.5 to 20 nm
wavelength region using an electron beam ion trap and a flat field spectrometer. The …

The spectrum of xenon excited in a low-inductance vacuum spark was photographed at high
resolution in the region of 9.5–15.5 nm. The observed transitions were identified as …

A custom, flat field, extreme ultraviolet spectrometer built specifically for use with low power
light sources that operate under ultrahigh vacuum conditions is reported. The spectral range …

The spectrum of ten times ionized xenon, Xe XI, was observed in the region 105–157 Å with
a low-inductance vacuum spark and a 10.7 m grazing-incidence spectrograph. About 200 …