New types of photocatalytic systems formed by coupling annealed large-sized NiFe-LDH
nanosheets with small-sized TiO 2 nanosheets were used to facilitate the rapid separation of …

Physical, optical, and mechanical properties of silicon carbonitride (a‐SiCN) films produced
by remote hydrogen plasma chemical vapor deposition (RP‐CVD) using aminosilane and …

PECVD SiC: H (SiCN: H) films were produced using tetramethylsilane (TMS) as a precursor
in a mixture with inert helium or ammonia as a source of nitrogen. Mild plasma conditions …

We report an investigation into 1, 4-Bis-N, N-(trimethylsilyl) piperazine (BTMSP) as a novel
precursor for the synthesis of silicon carbonitride films by chemical vapor deposition (CVD) …

In the study of the blue-violet emission properties of SiCN thin films, the emission intensity
depends on the crystal structure of thin films. The annealing process is widely used in the …

Reaction-sintered silicon carbide (RS-SiC) is widely used in optical mirrors for space
exploration. Maintaining surface integrity by obtaining both high surface finish and minimal …

SiCN thin film is one of the most attractive silicon-based materials due to its excellent
electrical, mechanical and optical properties. In this study, SiCN thin films have been …

Amorphous hydrogenated silicon carbonitride (a-SiCN: H) thin films were grown using
electron cyclotron resonance chemical vapour deposition using a mixture of methane …

Amorphous silicon carbonitride thin films for biomedical applications were deposited in an
industrial coating unit from a silicon target in different argon/nitrogen/acetylene mixtures by …

As a kind of wide band gap semiconductor, silicon carbonitride (SiCN) becomes a hot
material to research because of its unique electrical, chemical, thermodynamic and …