A piezoelectrically driven hydraulic amplification microvalve for use in compact high-
performance hydraulic pumping systems was designed, fabricated, and experimentally …

A different set of governing equations on the large deflection of plates are derived by the
principle of virtual work (PVW), which also leads to a different set of boundary conditions …

This paper presents exact solutions for nonlinear large deflection of thin circular membrane
loaded by a central point force using blister test with two types of boundary conditions and …

ZERO-NET mass-flux (ZNMF) actuators (also known as synthetic jet actuators) have been
investigated for flow control (separation control), mixing enhancement in microchannels …

Annular plate structures are commonly used in MEMS devices, particularly in pumps and
valves. In MEMS applications, large nonlinear deflections are routinely achieved. In this …

The nonlinear problem of large deflection of a simply supported piezoelectric layered plate
under initial tension is studied. The approach follows von Karman's plate theory for large …

Adhesion and residual stress play a critical role in the performance and reliability of MEMS.
The influence of residual stress on the adhesion-induced instability in MEMS is examined …

This paper discusses a methodology to select materials which deliver the best performance
for thermally actuated pneumatic and phase change microactuators. The material selection …

This paper reports the modeling, design, and dynamic simulation of a piezoelectrically-
driven microfabricated valve for high frequency regulation of high pressure fluid flows. The …

We consider the buckling of an annular thin elastic plate when it is subjected to uniform in-
plane compressive forces on its outer boundary. This geometrical inhomogeneity means that …