In the wake of the rapid development of the Internet of Things (IoT) and artificial intelligence
(AI) technology, a huge amount of wireless sensing nodes (WSNs) is urgently in demand in …

In this paper, a multi-frequency MEMS acoustic emission (AE) sensor is designed,
characterized, and tested. The sensor includes sixteen individual resonators tuned in the …

Currently, the most advanced micromachined microphones on the market are based on a
capacitive coupling principle. Capacitive micro-electromechanical-system-based (MEMS) …

The possibility to steer floating cells dispersed in water by means of flexural plate waves
(FPWs) generated by a 9 mm mm piezoelectric MEMS transducer has been explored. The …

Lead zirconate titanate (PZT) is a widely recognized piezoelectric ceramic exhibiting
excellent dielectric and ferroelectric properties over a wide range of temperature and …

This article aims to improve the performance of piezoelectric micromachined ultrasonic
transducers (PMUTs) in the transmission and reception phase including sensitivity, quality …

Microelectromechanical systems (MEMS) refer to miniaturized mechanical and
electromechanical elements that are fabricated through microelectronic processes. The …

The possibility of obtaining aligned clusters of microparticles in a drying water droplet by
employing standing flexural plate waves (FPWs) generated by a piezoelectric MEMS …

The analysis and experimental validation of the frequency response of the electrical
conductance of a piezoelectric micro electro-mechanical systems (MEMS) Flexural Plate …

A piezoelectric MEMS pressure sensor that exploits the first antisymmetric vibration mode
(A0) of Lamb waves is presented. The 6 mm× 6 mm diaphragm used to sense the applied …