AlN/Al0. 8Sc0. 2N film S mode lamb wave resonator with spurious mode suppression

Effective electromechanical coupling coefficient ({k} _ {{eff}}(2)) enhancement of a Lamb wave resonator with trapezoid grooves configuration

Y Fan, J Zhou, Q Xu, X Tong, Y Xie… - Applied Physics …, 2023 - ui.adsabs.harvard.edu
Abstract A first-order (${S} _ {1} $) Lamb wave resonator (LWR) with a trapezoid grooves
configuration on the top surface of the aluminum nitride membrane between interdigital …
被引用次数：3 相关文章 所有 2 个版本

A Comprehensive Approach for Total Suppression of In-Band Spurious Modes in UHF AlScN Lamb Wave Resonators and Filters

Z Tang, G Esteves, S Yen, TR Young… - Journal of …, 2024 - ieeexplore.ieee.org
In this paper, spurious mode suppression methods for Al Sc N Lamb wave resonators and
filters using the lowest order symmetric (S Lamb wave were meticulously studied and …
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The effect of busbar structure on Q factor enhancement and spurious mode suppression in Lamb wave resonators

Q Xu, Y Zou, C Gao, X Chen, J Zhou, X Tong… - Applied Physics …, 2024 - pubs.aip.org
Lamb wave resonators (LWRs) exhibiting high-quality factors and clean spectra
demonstrate promising applications in RF communication and sensing. This paper …
被引用次数：1 相关文章 所有 3 个版本
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[HTML][HTML] Low temperature coefficient of frequency AlN Lamb wave resonator using groove structure between interdigital transducers

H Li, J Zhou, Q Xu, Z Liu, Y Ren, Y Liu, S Guo… - Journal of Applied …, 2024 - pubs.aip.org
The lithographically tunable and small size features of Lamb wave resonators (LWRs) take a
bright future for their use in high frequency narrow band filters. Resonant frequency drift due …
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A Lamb Wave Resonator with Trapezoidal Interdigitated Electrodes

X Chen, Y Qu, T Luo, X Gu, X Huang… - 2024 IEEE MTT-S …, 2024 - ieeexplore.ieee.org
Due to its multimodal characteristics, filters composed of aluminum nitride-based Lamb
wave resonators are easily susceptible to interference from spurious modes. This paper …
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Lamé-Mode Resonator with Trapezoidal Grooves Based on Sc0.3Al0.7 N/AlN Composite Film Achieving Coupling Coefficient of 18.7%

Z Wang, J Jiang, C Ma, F Yang, Y Ma… - 2023 8th International …, 2023 - ieeexplore.ieee.org
This work proposes a novel Lamé-mode resonator with trapezoidal grooves, using a 30%
scandium-doped aluminum nitride (Sc_0.3Al_0.7~N) and aluminum nitride (AIN) composite …
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