Growth and applications of GeSn-related group-IV semiconductor materials

S Zaima, O Nakatsuka, N Taoka… - … and technology of …, 2015 - iopscience.iop.org
We review the technology of Ge 1− x Sn x-related group-IV semiconductor materials for
developing Si-based nanoelectronics. Ge 1− x Sn x-related materials provide novel …

New insights on Ni-Si system for microelectronics applications

RK Pandey, G Maity, S Pathak, P Kalita… - Microelectronic …, 2022 - Elsevier
Metal silicides and their nanostructures have been found to be suitable candidates for
device manufacturing in contemporary microelectronics industries to reduce contact …

Effects of additive elements on the phase formation and morphological stability of nickel monosilicide films

C Lavoie, C Detavernier, C Cabral Jr… - Microelectronic …, 2006 - Elsevier
Alloying elements can substantially affect the formation and morphological stability of nickel
monosilicide. A comprehensive study of phase formation was performed on 24 Ni alloys with …

Systematic TLM measurements of NiSi and PtSi specific contact resistance to n-and p-type Si in a broad doping range

N Stavitski, MJH Van Dal, A Lauwers… - IEEE electron device …, 2008 - ieeexplore.ieee.org
We present the data on specific silicide-to-silicon contact resistance (rho c) obtained using
optimized transmission-line model structures, processed for a broad range of various n-and …

Fabrication and electrical characterization of nickel/p-Si Schottky diode at low temperature

R Kumar, S Chand - Solid State Sciences, 2016 - Elsevier
In this study the current–voltage and capacitance–voltage characteristics of metal
semiconductor Ni/p-Si (100) based Schottky diode on p-type silicon measured over a wide …

Redistribution of Pt during the agglomeration of NiSi

D Mangelinck, FM Anak, K Dabertrand, S Guillemin… - Acta Materialia, 2024 - Elsevier
Due to the constant downscaling of microelectronic devices, thin films of Ni-Pt monosilicide,
Ni (Pt) Si, are widely used as contact materials on the active regions of complementary metal …

Nickel-silicide: carbon contact technology for n-channel MOSFETs with silicon–carbon source/drain

RTP Lee, LT Yang, TY Liow, KM Tan… - IEEE electron device …, 2007 - ieeexplore.ieee.org
To explore the potential of nickel-silicide: carbon (NiSi: C) as contact technology for
MOSFETs with silicon-carbon (Si: C) source/drain (S/D) regions, we examined the effects of …

Enhanced thermal stability of Ni/GeSn system using pre-amorphization by implantation

A Quintero, F Mazen, P Gergaud, N Bernier… - Journal of Applied …, 2021 - pubs.aip.org
Improving the thermal stability of Ni/GeSn intermetallics is of great importance to avoid
surface degradation and Sn segregation. For this purpose, we studied the effects of pre …

Sub-0.1-eV effective Schottky-barrier height for NiSi on n-type Si (100) using antimony segregation

HS Wong, L Chan, G Samudra… - IEEE electron device …, 2007 - ieeexplore.ieee.org
We report a new method of forming nickel silicide (NiSi) on n-Si with low contact resistance,
which achieves a Schottky barrier height of as low as 0.074 eV. Antimony (Sb) and nickel …

A comparative study of C, N and Xe pre-amorphization implantation processes for improving the thermal stability of NiSi films

S Guillemin, L Lachal, P Gergaud, A Grenier… - Microelectronic …, 2024 - Elsevier
In this paper, a comparative study of C-, N-and Xe-based pre-amorphization implantation
(PAI) processes is proposed. The impact of the use of such processes on the agglomeration …