Piezoelectric thin films for sensors, actuators, and energy harvesting

P Muralt, RG Polcawich, S Trolier-McKinstry - MRS bulletin, 2009 - cambridge.org
Piezoelectric microelectromechanical systems (MEMS) offer the opportunity for high-
sensitivity sensors and large displacement, low-voltage actuators. In particular, recent …

A review of ultrahigh frequency ultrasonic transducers

J Chen, C Fei, D Lin, P Gao, J Zhang, Y Quan… - Frontiers in …, 2022 - frontiersin.org
The ultrahigh-frequency (UHF) ultrasonic transducers are active in various fields, including
nondestructive evaluation in the semiconductor industry, microscopic biological organization …

Piezoelectric P (VDF-TrFE) film inkjet printed on silicon for high-frequency ultrasound applications

A Banquart, S Callé, F Levassort, L Fritsch… - Journal of Applied …, 2021 - pubs.aip.org
We investigated the innovative processing of poly (vinylidene fluoride-trifluoroethylene) P
(VDF x-TrFE 1-x)(x= 83 mol.%) by inkjet printing to deliver uniform and thickness-controlled …

Fabrication, modelling and use of porous ceramics for ultrasonic transducer applications

F Levassort, J Holc, E Ringgaard, T Bove… - Journal of …, 2007 - Springer
Porous ceramics are of interest for ultrasonic transducer applications. Porosity allows to
decrease acoustical impedance, thus improving transfer of acoustical energy to water or …

Development of porous piezoceramics for medical and sensor applications

E Ringgaard, F Lautzenhiser, LM Bierregaard… - Materials, 2015 - mdpi.com
The use of porosity to modify the functional properties of piezoelectric ceramics is well
known in the scientific literature as well as by the industry, and porous ceramic can be seen …

Effect of pore size and porosity on piezoelectric and acoustic properties of Pb(Zr0.53Ti0.47)O3 ceramics

T Bakarič, T Rojac, AP Abellard… - … in Applied Ceramics, 2016 - journals.sagepub.com
We studied the effect of porosity and pore morphology on the functional properties of Pb
(Zr0. 53Ti0. 47) O3 (PZT) ceramics for application in high frequency ultrasound transducers …

Acoustic properties of porous lead zirconate titanate backing for ultrasonic transducers

D Kuscer, J Bustillo, T Bakarič… - IEEE Transactions …, 2020 - ieeexplore.ieee.org
For transducer design, it is essential to know the acoustic properties of the materials in their
operating conditions. At frequencies over 15 MHz, standard methods are not well adapted …

Improvement of composite sol–gel process for manufacturing 40 μm piezoelectric thick films

A Bardaine, P Boy, P Belleville, O Acher… - Journal of the European …, 2008 - Elsevier
In this study, high performance piezoelectric thick films were prepared by depositing only a
few sol–gel infiltrated composite layers on Si/SiO2/Ti/Pt wafers. Lead zirconate titanate (PZT) …

Textured, lead-free piezoelectric ceramics with high figure of merit for energy harvesting

AB Haugen, E Ringgaard… - Journal of Physics …, 2021 - iopscience.iop.org
Piezoelectrics are key materials for energy conversion, for example in ultrasound
transducers and energy harvesters. This work presents the synthesis and characterization of …

Structural and piezoelectric properties evolution induced by cobalt doping and cobalt/niobium co-doping in BaTiO3

GM Osoro, D Bregiroux, MP Thi, F Levassort - Materials Letters, 2016 - Elsevier
Abstract Lead–zirconate–titanate PbZr (1− x) Ti x O 3 (PZT), materials for piezoelectric
applications are the dominant piezoceramics since their properties are high. However PZTs …