Capacitive sensors for the detection of mechanical quantities all rely on a displacement
measurement. The movement of a suspended electrode with respect to a fixed electrode …

We present a new approach to the modeling and simulation of flexible microstructures under
the effect of squeeze-film damping. Our approach utilizes the compressible Reynolds …

This paper presents the design, simulation, fabrication, and experimental characterization of
high-performance piezoelectric diaphragm and cantilever beam out-of-plane micro actuators …

The integration of micro-mechanical structures with electronics has increased the demand
for new CAD tools to support. Of the key importance for developing such CAD tools is the …

Double-layer membranes of thermally grown SiO 2 and chemically deposited Si 3N 4 as
well as perforated backelectrodes covered with the double layer and double layers of the …

Ce mémoire traite de l'étude du comportement thermique des capteurs de pression
capacitifs en silicium fabriqués à partir de la filière silicium/verre. Leur comportement …

The responses of capacitive pressure sensors to step and impulse waveforms are computed
for small deflections and low damping using the thin-plate theory. These sensors behave as …

Cette thèse porte sur les dispositifs de contrôle de faisceaux de protons balayés. La société
IBA (Ion Beam Applications), ayant besoin d'une d'unité moniteur pour équiper ses centres …

Integrated microsystems are a rapidly growing field with great potential. The realization of
complete microsystems with intelligent functionalities requires integration of sensors and …

We calculate the polarization function including only intra-Landau-level correlation effects of
striped Hall gas. Using the polarization function, the dielectric function, the dispersion of the …