Piezoelectric MEMS—Evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era

X Le, Q Shi, P Vachon, EJ Ng… - Journal of Micromechanics …, 2021 - iopscience.iop.org
The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …

A review on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications

Kurmendra, R Kumar - Microsystem Technologies, 2021 - Springer
This paper is designed to review the MEMS switch by considering key aspects on the basis
of mechanical structure, actuation methods, and types of contact and circuit configurations …

Comprehensive study on RF-MEMS switches used for 5G scenario

LY Ma, N Soin, MHM Daut, SFWM Hatta - IEEE Access, 2019 - ieeexplore.ieee.org
This paper presents a comprehensive study on radio frequency-microelectromechanical
systems (RF-MEMS) switches, which are expected to be extensively integrated into 5G …

Review and perspectives of micro/nano technologies as key-enablers of 6G

J Iannacci, HV Poor - IEEE Access, 2022 - ieeexplore.ieee.org
To date, the rollout of 5G (5 th generation of mobile communications) has been ongoing for
more than two years, with most of it still to come. Meanwhile, Key-Performance Indicators …

A perspective vision of micro/nano systems and technologies as enablers of 6g, super-iot, and tactile internet [point of view]

J Iannacci - Proceedings of the IEEE, 2022 - ieeexplore.ieee.org
Modern research in technology fields, such as electronics, distributed networks of
sensing/functional nodes, and wireless and wearable devices, is relentlessly converging …

[HTML][HTML] Exploitation of response surface method for the optimization of RF-MEMS reconfigurable devices in view of future beyond-5G, 6G and super-IoT applications

J Iannacci, G Tagliapietra, A Bucciarelli - Scientific Reports, 2022 - nature.com
The emerging paradigms of the Beyond-5G, 6G and Super-IoT will demand for high-
performance Radio Frequency (RF) passive components, and RF-MEMS technology, ie …

[HTML][HTML] Nonlinear restructuring of patterned thin films by residual stress engineering into out-of-plane wavy-shaped electrostatic microactuators for high-performance …

R Bajwa, H Saleh, M Shojaeian, I Tekin… - Microsystems & …, 2023 - nature.com
Electrostatic microelectromechanical (MEMS) switches are the basic building blocks for
various radio-frequency (RF) transceivers. However, conventional cantilever-based designs …

[HTML][HTML] Enhanced robustness of a bridge-type Rf-mems switch for enabling applications in 5G and 6G communications

J Casals-Terré, L Pradell, JC Heredia, F Giacomozzi… - Sensors, 2022 - mdpi.com
In this paper, new suspended-membrane double-ohmic-contact RF-MEMS switch
configurations are proposed. Double-diagonal (DDG) beam suspensions, with either two or …

Materials selection approaches and fabrication methods in RF MEMS switches

Kurmendra, R Kumar - Journal of Electronic Materials, 2021 - Springer
A state of the art review on Radio Frequency Micro-Electromechanical Systems (RF MEMS)
capacitive switches is reported by considering two key aspects:(1) materials selection …

[HTML][HTML] Machine learning-based modeling and generic design optimization methodology for radio-frequency microelectromechanical devices

R Bajwa, MK Yapici - Sensors, 2023 - mdpi.com
RF-MEMS technology has evolved significantly over the years, during which various
attempts have been made to tailor such devices for extreme performance by leveraging …