This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-
electro-mechanical systems) fabrication technologies and enabled micro devices of various …

The aim of this paper is to provide a review of micromirror array (MMA) technologies (2631
MMA research papers and patents were reviewed for this effort). The performance …

This work proposes a two-dimensional (2-D) laser scanning mirror with a novel actuating
structure composed of one magnet and two coils. The mirror-actuating device generates …

This research highlights a superior glass-wet-etch technique which enables a glass wafer to
be etched for more than 20 h in 49 wt% hydrofluoric acid (HF) only with Cr/Au film and a …

We report on the development of a free space, line of sight bidirectional optical wireless
communication system for personal area networking. The system includes several …

A monolithically integrated glass microlens optical scanner is presented. A new wafer-level
fabrication approach addresses the issue of microlens integration and alignment in …

Micromirrors play a vital role in various fields, including vision systems, optical networking,
and laser projects. In this paper, we developed a 2-DOF scanning mirror using flexible …

Micro mirrors for MEMS based free space point to point indoor wireless optical network (IWON)
Page 1 2015 International Conference on Optical MEMS and Nanophotonics (OMN) We2.4-1 …

This dissertation presents an optical neural probe for an implantable multi-wavelength
photostimulation system based on a newly-proposed MEMS optrode array (MOA) with …

This paper describes the driving voltage reduction of an optical switch that has an S-shaped
deformable thin-film mirror driven by an electrostatic force. The prototype optical switch has …