This work demonstrates a hybrid MEMS actuator platform that combines electrostatic and
piezoelectric actuators to displace a suspended MEMS platform along 3 degrees-of-freedom …

This paper proposes and demonstrates a chip-level-microassembly comb-drive XYZ-
microstage for providing large displacements and low crosstalk in scanning force …

This paper reports on a 1D PZT micromirror integrated with buried piezoresistors for quasi-
static feedback position control. The piezoresistors located along or below the PZT actuators …

Mixing high‐viscosity fluids is essential in chemical production, but it is challenging since the
Reynolds number is small in such a system. As a result, dead zones with insufficient mixing …

Command shaping is a driving technique for handling the large settling time of the high-Q-
MEMS actuators. The strong nonlinearity due to the electrostatic actuation limits the linear …

Optical systems typically use galvanometers (galvos) and scanners. Galvos move, quasi-
statically, from one static position to another. Scanners move in an oscillatory fashion …

This work presents novel multi degrees-of-freedom (DOF) actuators based on piezoelectric
and electrostatic actuation to generate both in-plane and out-of-plane motions, intended to …

This study presents an experimental demonstration of the motion characteristics of a comb-
drive actuator fabricated from heterogeneous structure and applied for cryogenic …

Cryogenically produced thin film structures at the research scale facilitate many novels
experiments. This paper discusses the construction of a fully integrated, MEMS based …

Optical systems typically use galvanometers (aka galvos) and scanners. Galvos move
optical elements such as mirrors, quasi-statically, from one static position to another, and an …