YW Lin, CJ Sun, HH Chang, YH Huang, TY Yu… - Applied Physics …, 2020 - pubs.aip.org
This paper reports a self-induced ferroelectric 2-nm-thick Ge-doped HfO 2 (Ge: HfO 2) thin
film. Ge thermal desorption, incorporation into HfO 2, and further Ge: HfO 2 crystallization …