Highly charged ions play a crucial role in magnetic fusion plasmas. These plasmas are
excellent sources for producing highly charged ions and copious amounts of radiation for …

We have measured extreme ultraviolet (EUV) spectra from highly charged tungsten ions in
low-density and high-temperature plasmas produced in the Large Helical Device at the …

Extreme-ultraviolet (EUV) spectra of Sn 13+− Sn 15+ ions have been measured in an
electron-beam ion trap (EBIT). A matrix inversion method is employed to unravel convoluted …

The method of tracer-encapsulated solid pellet (TESPEL) is now flourishing in various fields.
The original purpose to study impurity transport without giving substantial perturbation on …

Bright narrow band emission observed in optically thin plasmas of high-Z elements in the
extreme ultraviolet spectral region follows a quasi-Moseley's law. The peak wavelength can …

In this study, the effects of Cl2 radicals on dry development of spin-coated metal oxide resist
(MOR) and changes in its surface binding states were investigated to verify the mechanism …

The continuation of Moore's law for semiconductor fabrication envisages the introduction of
extreme ultraviolet lithography (EUVL) based on a source wavelength of 13.5 nm for high …

We have observed extreme ultraviolet (EUV) spectra from highly charged gadolinium and
neodymium ions in optically thin plasmas produced in the Large Helical Device at the …

We present recent results on the extreme ultraviolet (EUV) spectroscopy of highly charged
high Z ions in plasmas produced in the Large Helical Device (LHD) at the National Institute …

We have measured extreme ultraviolet spectra from tungsten ions in the 20 nm region in
plasmas produced in the Large Helical Device at the National Institute for Fusion Science …