High speed silicon wet anisotropic etching for applications in bulk micromachining: a review
Wet anisotropic etching is extensively employed in silicon bulk micromachining to fabricate
microstructures for various applications in the field of microelectromechanical systems …
microstructures for various applications in the field of microelectromechanical systems …
Micromachined high-g accelerometers: a review
V Narasimhan, H Li, M Jianmin - Journal of Micromechanics and …, 2015 - iopscience.iop.org
Abstract This Topical Review reviews research and commercial development of high-g
micromachined accelerometers. Emphasis is placed on different high-g sensing schemes …
micromachined accelerometers. Emphasis is placed on different high-g sensing schemes …
[图书][B] MEMS vibratory gyroscopes: structural approaches to improve robustness
C Acar, A Shkel - 2008 - books.google.com
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental
operational principles of micromachined vibratory rate gyroscopes, and introduces structural …
operational principles of micromachined vibratory rate gyroscopes, and introduces structural …
A bulk microfabricated multi-axis capacitive cellular force sensor using transverse comb drives
This paper presents design, fabrication and calibration results for a novel 2-DOF capacitive
force sensor capable of resolving forces up to 490 µN with a resolution of 0.01 µN in x, and …
force sensor capable of resolving forces up to 490 µN with a resolution of 0.01 µN in x, and …
Why is (111) silicon a better mechanical material for MEMS?
In this paper, we explain the mechanical properties of single-crystalline silicon with respect
to deflectional and torsional motions. Young's modulus, Poisson's ratio, and shear modulus …
to deflectional and torsional motions. Young's modulus, Poisson's ratio, and shear modulus …
Vibration-induced errors in MEMS tuning fork gyroscopes
SW Yoon, S Lee, K Najafi - Sensors and Actuators A: Physical, 2012 - Elsevier
This paper analyzes potential causes of vibration-induced error in ideal MEMS tuning fork
gyroscopes. Even though MEMS gyros are known to be highly susceptible to mechanical …
gyroscopes. Even though MEMS gyros are known to be highly susceptible to mechanical …
Monolithic integration of pressure plus acceleration composite TPMS sensors with a single-sided micromachining technology
J Wang, X Xia, X Li - Journal of Microelectromechanical …, 2011 - ieeexplore.ieee.org
This paper concerns the development of a single-side micromachined tire-pressure
monitoring system (TPMS) sensor for automobiles, which is with a piezoresistive pressure …
monitoring system (TPMS) sensor for automobiles, which is with a piezoresistive pressure …
A non-contact-type RF MEMS switch for 24-GHz radar applications
This paper presents the design, fabrication, and measurement results for a novel non-
contact-type radio-frequency (RF) microelectromechanical systems switch for 24-GHz radar …
contact-type radio-frequency (RF) microelectromechanical systems switch for 24-GHz radar …
A high-aspect-ratio two-axis electrostatic microactuator with extended travel range
The design, fabrication, modelling, and control of a two-axis electrostatic microactuator for
precision manipulation tasks is described. A high-yield fabrication process using deep …
precision manipulation tasks is described. A high-yield fabrication process using deep …
Package-friendly piezoresistive pressure sensors with on-chip integrated packaging-stress-suppressed suspension (PS3) technology
J Wang, X Li - Journal of Micromechanics and Microengineering, 2013 - iopscience.iop.org
An on-chip integrated packaging-stress-suppressed suspension (PS 3) technology for a
packaging-stress-free pressure sensor is proposed and developed. With a MIS (microholes …
packaging-stress-free pressure sensor is proposed and developed. With a MIS (microholes …