AlGaN/GaN MIS-HEMT with PECVD SiNx, SiON, SiO2 as Gate Dielectric and Passivation Layer

K Geng, D Chen, Q Zhou, H Wang - Electronics, 2018 - mdpi.com
Three different insulator layers SiNx, SiON, and SiO2 were used as a gate dielectric and
passivation layer in AlGaN/GaN metal–insulator–semiconductor high-electron-mobility …

Characterization of AlGaN/GaN based HEMT for low noise and high frequency application

SK Dubey, M Mishra, A Islam - International Journal of …, 2022 - Wiley Online Library
This article presents a detailed study on AlGaN/GaN based HEMT for DC (such as ID− V DS,
ID− V GS and gm), RF (such as cut off frequency, f T and maximum oscillation frequency …

Characterization of m-GaN and a-GaN crystallographic planes after being chemically etched in TMAH solution

N Al Taradeh, E Frayssinet, C Rodriguez, F Morancho… - Energies, 2021 - mdpi.com
This paper proposes a new technique to engineer the Fin channel in vertical GaN FinFET
toward a straight and smooth channel sidewall. Consequently, the GaN wet etching in the …

A Review of GaN Channel-Based MOSHEMTs for Next-Generation Medium/Low-Voltage Rating and High-Speed RF Power Applications

G Deshpande, S Bhattacharya, J Ajayan… - Journal of Electronic …, 2024 - Springer
This comprehensive review delves into the intricate realm of GaN-based metal–oxide–
semiconductor (MOS) high-electron-mobility transistors (HEMTs), providing an exhaustive …

Review of bias-temperature instabilities at the III-N/dielectric interface

C Ostermaier, P Lagger, M Reiner, D Pogany - Microelectronics Reliability, 2018 - Elsevier
Two particular defects are commonly discussed at the III-N interface: the required donor
states, known to exist from the formation of the two-dimensional electron gas (2DEG) below …

Correlating device behaviors with semiconductor lattice damage at MOS interface by comparing plasma-etching and regrown recessed-gate Al2O3/GaN MOS-FETs

L He, L Li, F Yang, Y Zheng, J Zhang, T Que, Z Liu… - Applied Surface …, 2021 - Elsevier
We correlate electical behaviors of recessed-gate Al 2 O 3/GaN MOS-FETs with the lattice
damage at MOS interface region by directly comparing plasma-etching (inductively coupled …

[HTML][HTML] Impact of PECVD deposition on dielectric charge and passivation for n-GaN/SiOx interfaces

O Richard, A Soltani, R Adhiri, A Ahaitouf, H Maher… - Results in …, 2024 - Elsevier
Controlling properties of GaN/dielectric interfaces is crucial for determining the
characteristics of MOS-HEMT devices and their stability. Interface properties are largely …

Investigation of Ta2O5 as an Alternative High- Dielectric for InAlN/GaN MOS-HEMT on Si

S Kumar, H Kumar, S Vura, AS Pratiyush… - … on Electron Devices, 2019 - ieeexplore.ieee.org
We report on the demonstration and investigation of Ta 2 O 5 as high-k dielectric for
InAlN/GaN-MOS high-electron mobility transistor (HEMT)-on-Si. Ta 2 O 5 of thickness 24 nm …

Dynamic Characteristics of GaN MISHEMT With 5-nm In-Situ SiNx Dielectric Layer

Y Zhang, L Xu, Y Gu, H Guo, H Jiang… - IEEE Journal of the …, 2022 - ieeexplore.ieee.org
A comprehensive study on dynamic characteristics of GaN MISHEMT with a 5nm-thick in-situ
SiN x dielectric is presented. Effects of both negative and positive gate bias on threshold …

Investigation of the effect of different types of SiN layers and cap-GaN on the surface electronic states of AlGaN/GaN heterostructures with 2DEG using X-ray and UV …

V Mansurov, T Malin, V Golyashov, D Milakhin… - Applied Surface …, 2023 - Elsevier
Determining the effect of different crystalline and amorphous passivation layers on the
electronic states and surface properties of III-nitride heterostructures is an important task …