MEMS switch is a movable device manufactured by means of semiconductor technology,
possessing many incomparable advantages such as a small volume, low power …

The present study focuses on state-of-the-art of the demand, operating principles, design
parameters, different materials for beam and dielectric, already existing technologies and …

The pull-in voltage of an electrostatically actuated cantilever-based series type MEMS switch
suitable as a switching device in several applications can be lowered by reducing its …

The main challenge in the commercialization of the RF-MEMS switches is their reliability,
related to both the electrical and mechanical domains. The development of test standards …

This paper illustrates the design, modeling, and analysis of bridge type structure based
capacitive RF MEMS switch with different beam thickness and materials. We have used …

Abstract Micro-electromechanical systems (MEMS)-based devices comprise suspended
structures. A sacrificial layer is required to realize these structures. Usually, metal and …

RF MEMS switches are well known to exhibit performance superior to solid-state devices.
However, electromechanical issues, such as repeatability and higher pull-in voltage, are a …

This paper presents design and optimization of a bridge-type RF MEMS switch with and
without perforations having non-uniform meanders for applications in the low-frequency (X …

For 5 G applications, isolation of better than-40 dB is required to prevent cross-talk between
adjacent channels. Isolation of reported Radio Frequency (RF.) Microelectromechanical …

This paper presents the design of a MEMS shunt capacitive switch with fixed–fixed beam for
high frequency RF applications. The switch dimensions were very carefully chosen to obtain …