MicroElectroMechanical Systems (MEMS) technology offers considerable potential
throughout the manufacturing sector, because of certain intrinsic advantages in terms of low …

Surface roughness occurs in a wide variety of processes where it is both difficult to avoid
and control. When two bodies are separated by a small distance the roughness starts to play …

Interfacial adhesion and friction are important factors in determining the performance and
reliability of microelectro-mechanical systems. We demonstrate that the adhesion of …

Micro-mechanical devices, such as MEMS, having layers thereon, and methods of forming
the layers, are disclosed. In one aspect, a method may include forming a layer including an …

Because of large surface-to-volume ratios and low restoring forces, unwanted adhesion and
friction can dominate the performance of microelectromechanical systems (MEMS) devices …

Using a surface forces apparatus (SFA) and an atomic force microscope (AFM) we have
studied the effects of surface roughness (root-mean-square (RMS) roughness between 0.3 …

Due to their large surface-area-to-volume ratio, most micromechanical devices are
susceptible to adhesion, friction, and wear. Conventional approaches to abate the …

Stiction in microelectromechanical systems (MEMS) has been a major failure mode ever
since the advent of surface micromachining in the 80s of the last century due to large …

Nanoparticle-based theranostics combines tumor imaging and cancer therapy in one
platform, but the synthesis of theranostic agents is impeded by chemical groups on the …

By integrating interferometric deflection data from electrostatically actuated microcantilevers
with a numerical finite difference model, we have developed a step-by-step procedure to …