Y Hua, S Wang, B Li, G Bai, P Zhang - Micromachines, 2021 - mdpi.com
Micromirrors based on micro-electro-mechanical systems (MEMS) technology are widely employed in different areas, such as optical switching and medical scan imaging. As the key …
Q Cao, Y Tan, R Dong, W Shen - IEEE Transactions on …, 2018 - ieeexplore.ieee.org
In this paper, a data-driven modeling method for electromagnetically actuated micromirror in random noisy environment is proposed. In this method, the electromagnetic micromirror is …
R Dong, Y Tan, Q Tan - IEEE Transactions on Systems, Man …, 2018 - ieeexplore.ieee.org
Underdamped feature and hysteresis existing in electromagnetic scanning micro-mirrors (EMSMs) often lead to oscillation and undesired positioning error of deflection angle. In this …
The micromirror based on micro-electro-mechanical systems (MEMS) technology is widely employed in different areas, such as scanning, imaging and optical switching. This paper …
Y Qin, W Sun, P Zuo, JTW Yeow - Nonlinear Dynamics, 2018 - Springer
In this paper, a mathematical model is first established for an electromagnetic actuated polymer composite-based MEMS hard-magnetic micromirror. The model consists of the …
W Sun, H Chen, JTW Yeow - IEEE Transactions on Systems …, 2021 - ieeexplore.ieee.org
This article investigates the controller design problem for an electromagnetic torsional micromirror with guaranteed transient performance constraint. Specifically, the developed …
H Chen, M Pallapa, WJ Sun, ZD Sun… - Journal of …, 2014 - iopscience.iop.org
In this paper, a nonlinear feedback control algorithm is proposed to improve the performance of an electromagnetic actuated polymer MEMS hard-magnetic micromirror. The …
In Optical Nano and Micro Actuator Technology, leading engineers, material scientists, chemists, physicists, laser scientists, and manufacturing specialists offer an in-depth, wide …
D Flynn, MPY Desmulliez - IEEE transactions on magnetics, 2009 - ieeexplore.ieee.org
NiFe thin films deposited by pulse reverse (PR) electrodeposition are promising candidates for the next generation of core magnetic material to be used in magnetic components …