A review of micro-contact physics for microelectromechanical systems (MEMS) metal contact switches

BF Toler, RA Coutu, JW McBride - Journal of Micromechanics and …, 2013 - iopscience.iop.org
Innovations in relevant micro-contact areas are highlighted, these include, design, contact
resistance modeling, contact materials, performance and reliability. For each area the basic …

[HTML][HTML] Nanoelectromechanical switches for low-power digital computing

A Peschot, C Qian, TJ King Liu - Micromachines, 2015 - mdpi.com
The need for more energy-efficient solid-state switches beyond complementary metal-oxide-
semiconductor (CMOS) transistors has become a major concern as the power consumption …

Demonstration of integrated micro-electro-mechanical relay circuits for VLSI applications

M Spencer, F Chen, CC Wang… - IEEE Journal of Solid …, 2010 - ieeexplore.ieee.org
This work presents measured results from test chips containing circuits implemented with
micro-electro-mechanical (MEM) relays. The relay circuits designed on these test chips …

Mechanical computing redux: Relays for integrated circuit applications

V Pott, H Kam, R Nathanael, J Jeon… - Proceedings of the …, 2010 - ieeexplore.ieee.org
Power density has grown to be the dominant challenge for continued complementary metal–
oxide–semiconductor (CMOS) technology scaling. Together with recent improvements in …

4-terminal relay technology for complementary logic

R Nathanael, V Pott, H Kam, J Jeon… - 2009 IEEE International …, 2009 - ieeexplore.ieee.org
A 4-terminal (4T) relay technology is proposed for complementary logic circuit applications.
The advantage of the 4T relay design is that it provides a means for electrically adjusting the …

Design, optimization, and scaling of MEM relays for ultra-low-power digital logic

H Kam, TJK Liu, V Stojanović… - IEEE Transactions on …, 2010 - ieeexplore.ieee.org
Microelectromechanical relays have recently been proposed for ultra-low-power digital logic
because their nearly ideal switching behavior can potentially enable reductions in supply …

[HTML][HTML] Nanoelectromechanical relay without pull-in instability for high-temperature non-volatile memory

S Rana, J Mouro, SJ Bleiker, JD Reynolds… - Nature …, 2020 - nature.com
Emerging applications such as the Internet-of-Things and more-electric aircraft require
electronics with integrated data storage that can operate in extreme temperatures with high …

Body-biased complementary logic implemented using AlN piezoelectric MEMS switches

N Sinha, TS Jones, Z Guo… - Journal of …, 2012 - ieeexplore.ieee.org
This paper reports on the implementation of low-voltage complementary mechanical logic
achieved by using body-biased aluminum nitride (AlN) piezoelectric microelectro …

A review on key issues and challenges in devices level MEMS testing

M Shoaib, NH Hamid, AF Malik, NB Zain Ali… - Journal of …, 2016 - Wiley Online Library
The present review provides information relevant to issues and challenges in MEMS testing
techniques that are implemented to analyze the microelectromechanical systems (MEMS) …

Characterization of contact resistance stability in MEM relays with tungsten electrodes

Y Chen, R Nathanael, J Jeon, J Yaung… - Journal of …, 2012 - ieeexplore.ieee.org
The impact of device operating parameters on the ON-state resistance (R ON) of
microelectromechanical relays with tungsten (W) electrodes is reported. Due to the …