The purpose of this article is to propose both state and time-dependent preventive
maintenance policy for a multi-state deteriorating system, which is equipped with inspection …

This paper proposes a dynamic preventive maintenance strategy for a multi-state
deteriorating production system. A real-time operating state can be derived via the healthy …

(57) ABSTRACT A method of controlling surface non-uniformity of a Wafer in a polishing
operation includes (a) providing a model for a Wafer polishing that de? nes a plurality of …

Although various monitoring techniques are currently used for semiconductor
manufacturing, OES is a non-contact and non-destructive plasma measurement tool that …

In this paper, we are interested in the integration of scheduling and Advanced Process
Control (APC) in semiconductor manufacturing. We consider the problem of scheduling jobs …

This paper deals with a method for equipment health monitoring through a multivariate
approach. The approach concentrates on the autonomous classification of different process …

With current high standards for product quality, reliability and performance, semiconductor
manufacturers are constantly looking for ways and means to monitor and control the …

Equipment failure is a serious issue in the mining sector since it affects both reliability and
availability. This in turn may result in production losses. Strategies are thus needed to …

Zafman LLP (57) ABSTRACT A method of controlling Surface non-uniformity of a wafer in a
polishing operation includes (a) providing a model for a wafer polishing that defines a …

In this thesis, we discussed various possibilities of integrating scheduling decisions with
information and constraints from Advanced Process Control (APC) systems in …