Layer‐engineered functional multilayer thin‐film structures and interfaces through atomic and molecular layer deposition

M Heikkinen, R Ghiyasi… - Advanced Materials …, 2024 - Wiley Online Library
Atomic layer deposition (ALD) technology is one of the cornerstones of the modern
microelectronics industry, where it is exploited in the fabrication of high‐quality inorganic …

Investigation and review of the thermal, mechanical, electrical, optical, and structural properties of atomic layer deposited high-k dielectrics: Beryllium oxide, aluminum …

JT Gaskins, PE Hopkins, DR Merrill… - ECS Journal of Solid …, 2017 - iopscience.iop.org
Atomic layer deposited (ALD) high-dielectric-constant (high-k) materials have found
extensive applications in a variety of electronic, optical, optoelectronic, and photovoltaic …

Fracture Mechanics and Oxygen Gas Barrier Properties of Al2O3/ZnO Nanolaminates on PET Deposited by Atomic Layer Deposition

V Chawla, M Ruoho, M Weber, AA Chaaya, AA Taylor… - Nanomaterials, 2019 - mdpi.com
Rapid progress in the performance of organic devices has increased the demand for
advances in the technology of thin-film permeation barriers and understanding the failure …

Mechanical properties of crystalline and amorphous aluminum oxide thin films grown by atomic layer deposition

L Aarik, H Mändar, A Tarre, HM Piirsoo… - Surface and Coatings …, 2022 - Elsevier
Mechanical properties of atomic-layer deposited alumina thin films containing amorphous, α-
Al 2 O 3, θ-Al 2 O 3, δ-Al 2 O 3 and γ-Al 2 O 3 phases were characterized. To initiate the α-Al …

Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

OME Ylivaara, L Kilpi, X Liu, S Sintonen, S Ali… - Journal of Vacuum …, 2017 - pubs.aip.org
Atomic layer deposition (ALD) is based on self-limiting surface reactions. This and cyclic
process enable the growth of conformal thin films with precise thickness control and sharp …

Topographic reconstruction and mechanical analysis of atomic layer deposited Al2O3/TiO2 nanolaminates by nanoindentation

E Coy, L Yate, Z Kabacińska, M Jancelewicz, S Jurga… - Materials & Design, 2016 - Elsevier
A novel method of nanomechanical testing of multilayered Al 2 O 3/TiO 2 nanolaminates
was implemented by the nanoindentation technique. The indentation data were …

Enhancing Internal and External Stability of Perovskite Solar Cells Through Polystyrene Modification of the Perovskite and Rapid Open‐Air Deposition of ZnO/AlOx …

H Asgarimoghaddam, SS Khamgaonkar, A Mathur… - Solar …, 2024 - Wiley Online Library
In this study, the internal and external stabilities of ap–i–n methylammonium lead iodide
perovskite solar cell (PSC) are improved. Polystyrene (PS) is introduced into the perovskite …

Hardness and modulus of elasticity of atomic layer deposited Al2O3-ZrO2 nanolaminates and mixtures

T Jogiaas, R Zabels, A Tarre, A Tamm - Materials Chemistry and Physics, 2020 - Elsevier
Atomic layer deposition was used to produce 90–105 nm thick alumina-zirconia mixtures
and nanolaminate structures on soda-lime glass substrate. The resultant chemical and …

Influence of ZnO/graphene nanolaminate periodicity on their structural and mechanical properties

I Iatsunskyi, M Baitimirova, E Coy, L Yate, R Viter… - Journal of materials …, 2018 - Elsevier
Structural, electronic and mechanical properties of ZnO/Graphene (ZnO/G) nanolaminates
fabricated by low temperature atomic layer deposition (ALD) and chemical vapor deposition …

SCIP: a new simultaneous vapor phase coating and infiltration process for tougher and UV-resistant polymer fibers

I Azpitarte, GA Botta, C Tollan, M Knez - RSC advances, 2020 - pubs.rsc.org
The physical properties of polymers can be significantly altered by blending them with
inorganic components. This can be done during the polymerization process, but also by post …