Recent advances on MEMS based Infrared Thermopile detectors

SB Mbarek, N Alcheikh, MI Younis - Microsystem Technologies, 2022 - Springer
During the last decade, IR MEMS thermopile detectors have become a topic of increasing
interest because of their reliable characteristics and excellent cost-performance ratio …

Transduction in M/NEMS-Actuation and Sensing: A Review

V Pachkawade - IEEE Sensors Journal, 2024 - ieeexplore.ieee.org
This article covers rigorous overview of diverse transduction principles that have enabled
successful development of micro/nanoelectromechanical systems (MEMS/NEMS) devices …

Monolithic Integration of Ultraslim Flow Sensor and Medical Guidewire by Laser Filament Scanning Sintering for In Vivo Diagnostics of Cardiovascular Diseases

MO Cho, S Kim, S Back, W Jang, JH Choi, B Kang… - ACS …, 2023 - ACS Publications
In this study, an ultraslim thermal flow sensor system integrated onto a 340 μm diameter
medical guidewire was developed using a laser filament scanning sintering method for the …

MEMS thermal gas flow sensor with self-test function

W Ke, M Liu, T Li, Y Wang - Journal of Micromechanics and …, 2019 - iopscience.iop.org
In this paper, the design, fabrication and characterization of a MEMS thermal gas flow
sensor with self-test function are presented. The flow sensor is composed of a platinum …

[HTML][HTML] Self-powered, multi-angle gas flow sensing based on photovoltaics with porous graphite electrodes

H Zhang, X Xing, N Armakavicius, H Meng - Sensors and Actuators A …, 2024 - Elsevier
A self-powered, multi-attack angle gas/air flow sensor without azimuth directional constraints
has been designed and developed in this study. Two essential components, the porous …

Numerical analysis and RSM modeling of microthermal flowmeter performance

V Kermani, SH Hashemabadi - International Journal of Thermal Sciences, 2022 - Elsevier
Thermal MEMS (micro-electro-mechanical system) flowmeter is one of the recent most
popular flowmeters, in which its sensitivity to flow rate variations could be improved by …

Intelligent MEMS Thermal Mass Flowmeter Based on Modified Sage-Husa Adaptive Robust-Strong Tracking Kalman Filtering

X Yan, L Zhao, C Tang, J Zou, W Gao… - IEEE Sensors …, 2024 - ieeexplore.ieee.org
Microelectromechanical system (MEMS)-based thermal flow sensors are well known for their
fast response and compact size in gas flow measurement. Nevertheless, these sensors …

Assessment of a Flow-Measurement Technique for the Printability of Extrusion-based Bioprinting

WC Tseng, CY Liao, L Chassagne… - IEEE Robotics and …, 2024 - ieeexplore.ieee.org
Extrusion-based 3D bioprinting is a common application in tissue engineering used to
fabricate porous and complex scaffolds for tissue regeneration and repair. Flow-rate …

[HTML][HTML] 3D Axisymmetric exact solutions of the piezo-coating sensors for coating/substrate system under charged conical contact

PF Hou, WH Zhang - International Journal of Solids and Structures, 2020 - Elsevier
A complete set of frictionless conical contact (indentation) theory of the piezoelectric contact
mechanics (PCM) for transversely isotropic piezoelectric elasticity coated system (TIPECS) …

NEMS based actuation and sensing

V Pachkawade - Authorea Preprints, 2023 - techrxiv.org
This article offers rigorous overview of diverse transduction methods that have enabled
successful development of Micro/Nanoelectromechanical Systems (MEMS/NEMS) …