NAND memory arrays, devices comprising semiconductor channel material and nitrogen, and methods of forming NAND memory arrays

CM Carlson, HW Liu, J Li, D Pavlopoulos - US Patent 10,854,747, 2020 - Google Patents
Some embodiments include device having a gate spaced from semiconductor channel
material by a dielectric region, and having nitrogen-containing material directly against the …

Semiconductor device and method of manufacturing same

T Morita, H Okuchi, S Keiichi, H Yamashita… - US Patent App. 17 …, 2022 - Google Patents
In one embodiment, a semiconductor device includes a substrate, and a plurality of
electrode layers provided sepa rately from each other in a first direction perpendicular to a …

Semiconductor memory device and method of manufacturing semiconductor memory device

S Harumi, Y Mitani - US Patent 11,417,674, 2022 - Google Patents
A semiconductor memory device according to an embodiment includes: a semiconductor
layer; a gate electrode layer; a first insulating layer provided between the semiconductor …

Methods of forming NAND memory arrays

CM Carlson, HW Liu, J Li, D Pavlopoulos - US Patent 11,404,571, 2022 - Google Patents
Some embodiments include device having a gate spaced from semiconductor channel
material by a dielectric region, and having nitrogen-containing material directly against the …

Semiconductor device including nitride spacers

J Kim, J Lee - US Patent App. 17/680,413, 2022 - Google Patents
(57) ABSTRACT A semiconductor device comprising: a substrate; an elec trode structure
disposed on the substrate while extending in a first direction, the electrode structure …

Transistors and arrays of elevationally-extending strings of memory cells

R Gandhi, A Benvenuti, GM Paolucci - US Patent 11,538,919, 2022 - Google Patents
(57) ABSTRACT A transistor comprises a channel region having a frontside and a backside.
A gate is adjacent the frontside of the channel region with a gate insulator being between …

Integrated circuitry comprising a memory array comprising strings of memory cells and methods used in forming a memory array comprising strings of memory cells

D Billingsley, JD Greenlee, JD Hopkins, YJ Hu… - US Patent …, 2023 - Google Patents
A method used in forming a memory array comprising strings of memory cells comprises
forming an upper stack directly above a lower stack. The lower stack comprises vertically …

Integrated circuitry comprising a memory array comprising strings of memory cells and methods used in forming a memory array comprising strings of memory cells

D Billingsley, JD Greenlee, JD Hopkins, YJ Hu… - US Patent …, 2023 - Google Patents
(57) ABSTRACT A method used in forming a memory array comprising strings of memory
cells comprises forming an upper stack directly above a lower stack. The lower stack …

Memory arrays comprising strings of memory cells and methods used in forming a memory array comprising strings of memory cells

D Billingsley, JD Greenlee, JD Hopkins… - US Patent 11,476,274, 2022 - Google Patents
A memory array comprising strings of memory cells comprises an upper stack above a lower
stack. The lower stack comprises vertically-alternating lower conductive tiers and lower …

System and method for radical and thermal processing of substrates

X Zhang, AJ Mayur, S Sharma, NL Tam… - US Patent …, 2023 - Google Patents
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