Advances in 3D silicon-based lithium-ion microbatteries
Miniaturization of modern microelectronics to accommodate the development of portable
and smart devices requires independent energy storage that is compact, lightweight …
and smart devices requires independent energy storage that is compact, lightweight …
Miniaturized lithium-ion batteries for on-chip energy storage
Z Wang, Y Chen, Y Zhou, J Ouyang, S Xu… - Nanoscale …, 2022 - pubs.rsc.org
The development of microelectronic products increases the demand for on-chip miniaturized
electrochemical energy storage devices as integrated power sources. Such electrochemical …
electrochemical energy storage devices as integrated power sources. Such electrochemical …
Thermo-mechanical characterization and stress engineering of Lipon solid electrolyte
A high temperature multibeam-optical-stress sensor (HTMOSS) was used to characterize the
coefficient of thermal expansion (CTE) and yield stress of 1-micron thick Lipon films. Fully …
coefficient of thermal expansion (CTE) and yield stress of 1-micron thick Lipon films. Fully …