Effect of the crystallinity of MOCVD-grown ZnO: N on the diffusion of impurities

Structural and electrical properties of nitrogen-doped ZnO thin films

ES Tuzemen, K Kara, S Elagoz, DK Takci… - Applied Surface …, 2014 - Elsevier
ZnO and nitrogen-doped ZnO thin films were prepared onto glass substrate by pulsed
filtered cathodic vacuum arc deposition (PFCVAD) system at room temperature. The …
被引用次数：26 相关文章 所有 6 个版本

Comparison of N-doped ZnO and N–Al codoped ZnO thin films deposited by pulsed filtered cathodic vacuum arc deposition

E Senadim Tuzemen, K Kara, DK Takci… - Indian Journal of Physics, 2015 - Springer
N-doped ZnO and N–Al codoped ZnO films are deposited onto glass substrate at room
temperature by pulsed filtered cathodic vacuum arc deposition system. The films are …
被引用次数：4 相关文章 所有 7 个版本