This is a tutorial on the mathematical theory and process control applications of linear matrix
inequalities (LMIs) and bilinear matrix inequalities (BMIs). Many convex inequalities …

Many process systems can be modeled as a stable Wiener system, which is a stable linear
system followed by a static nonlinearity. A nonlinear control design procedure is presented …

This work focuses on the design and implementation of a feedback control system on a
parallel electrode plasma etching (PE) process with showerhead arrangement used to etch …

This paper presents a nonlinear control design for a first-principles based model of an argon
plasma process. In this study, a Hammerstein-type structure was employed as a basis for a …

This thesis develops various methods for the robust and stochastic model-based control of
uncertain dynamical systems. Several different types of uncertainties are considered, as well …

Sheet and film processes such as polymer film extruders, paper machines, and coating
processes are large scale and high speed. Addressing model uncertainty for these …

The use of first-principles based models of plasma processes is discussed in this paper.
Such processes are essentially highly nonlinear, feature complex interactions and are …

The development of general and practical control algorithms for dissipative nonlinear partial
differential equation (PDE) systems that mathematically describe fluid flow and transport …