Capacitive micromachined ultrasonic transducer (CMUT) was introduced as an alternative to
the piezoelectric thick-film-based transducers in medical imaging applications. Gradually …

The ultrasonic transducer industry is dominated by piezoelectric materials. As an emerging
alternative, capacitive micromachined ultrasound transducers (CMUTs) offer wider …

In this paper we present a simple post-CMOS compatible sacrificial release method of
fabricating SU-8 based Capacitive Micromachined Ultrasonic Transducer (CMUT) for low …

The authors report, for the first time, a simple one-step manufacturing process, without the
use of any sacrificial layers, applied for the fabrication of SU-8 ultrasound transducers …

We present a successful fabrication and characterization of a capacitive micromachined
ultrasonic transducer (CMUT) with SU-8 as the membrane material. The goal of this …

This paper describes the fabrication and electrical characterization of a capacitive
micromachined ultrasonic transducers manufactured using polymers. The SU-8 was used as …

In this paper, a simple fabrication process for SU-8 in-plane micro electro-mechanical
systems (MEMS) structures, called “border-bulk micromachining”, is introduced. It aims to …