A review on surface stress-based miniaturized piezoresistive SU-8 polymeric cantilever sensors
R Mathew, A Ravi Sankar - Nano-micro letters, 2018 - Springer
In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with
piezoresistive readout combined with the advances in molecular recognition techniques …
piezoresistive readout combined with the advances in molecular recognition techniques …
Smart self-sensing composite: piezoelectric and magnetostrictive FEA modeling and experimental characterization using wireless detection systems
This research work focuses on the development of a piezoelectric magnetostrictive smart
composite with advanced sensing capability. The composite piezoelectric property is …
composite with advanced sensing capability. The composite piezoelectric property is …
A novel micro-scaled multi-layered optical stress sensor for force sensing
Miniaturization and integration of sensors on chip has become essential with advancements
of artificial intelligence and the Internet of Thing. The size of existing microbend optical …
of artificial intelligence and the Internet of Thing. The size of existing microbend optical …
CMOS-Compatible scalable microfabrication of graphene polymeric strain gauge arrays
MC Taşdelen - 2020 - research.sabanciuniv.edu
Over the years, microelectromechanical systems (MEMS) have been utilized widely in
sensing applications due to their characteristics such as small form-factor, ultra-high …
sensing applications due to their characteristics such as small form-factor, ultra-high …
[PDF][PDF] A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors
RMAR Sankar - academia.edu
In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with
piezoresistive readout combined with the advances in molecular recognition techniques …
piezoresistive readout combined with the advances in molecular recognition techniques …