Characterization of SiO2/4H-SiC Interfaces in 4H-SiC MOSFETs: A Review

P Fiorenza, F Giannazzo, F Roccaforte - Energies, 2019 - mdpi.com
This paper gives an overview on some state-of-the-art characterization methods of SiO2/4H-
SiC interfaces in metal oxide semiconductor field effect transistors (MOSFETs). In particular …

Bias temperature instability in SiC metal oxide semiconductor devices

C Yang, S Wei, D Wang - Journal of Physics D: Applied Physics, 2021 - iopscience.iop.org
Although silicon carbide (SiC) metal oxide semiconductor field-effect transistors (MOSFETs)
are commercially available, bias temperature instability (BTI) defined as shifts in V th in SiC …

[HTML][HTML] Energy distribution of Al2O3/diamond interface states characterized by high temperature capacitance-voltage method

X Zhang, T Matsumoto, U Sakurai, T Makino, M Ogura… - Carbon, 2020 - Elsevier
In our previous work, we demonstrated the world's first inversion-type p-channel diamond
metal–oxide–semiconductor field-effect transistor (MOSFET). However, it exhibited low …

Inversion-type p-channel diamond MOSFET issues

X Zhang, T Matsumoto, S Yamasaki, CE Nebel… - Journal of Materials …, 2021 - Springer
This article reviews the state of the art in inversion-type p-channel diamond MOSFETs. We
successfully developed the world's first inversion-channel homoepitaxial and heteroepitaxial …

Interface and Border Traps in the Gate Stack of Carbon Nanotube Film Transistors with an Yttria Dielectric

H Xiao, Y Liu, S Ding, Y Gao, M Zhai… - ACS Applied …, 2023 - ACS Publications
Measurement and optimization of interface states in metal oxide semiconductors are the
premise of building high-performance and high-reliability field-effect transistors (FETs) …

Ideal phonon-scattering-limited mobility in inversion channels of 4H-SiC (0001) MOSFETs with ultralow net doping concentrations

M Sometani, T Hosoi, H Hirai, T Hatakeyama… - Applied Physics …, 2019 - pubs.aip.org
The phonon-limited mobility in 4H-silicon carbide (SiC) inversion channels was precisely
evaluated by employing ultralow net doping concentrations. The measured mobility in the …

Electrical characterization of SiC MOS capacitors: A critical review

P Pande, D Haasmann, J Han, HA Moghadam… - Microelectronics …, 2020 - Elsevier
This paper reviews the feasibility of the state-of-the-art electrical techniques adopted from Si
technology for characterization of SiC MOS devices. The inability of these conventional …

Electron trapping at SiO2/4H-SiC interface probed by transient capacitance measurements and atomic resolution chemical analysis

P Fiorenza, F Iucolano, G Nicotra, C Bongiorno… - …, 2018 - iopscience.iop.org
Studying the electrical and structural properties of the interface of the gate oxide (SiO 2) with
silicon carbide (4H-SiC) is a fundamental topic, with important implications for …

Generation of deep levels near the 4H-SiC surface by thermal oxidation

H Fujii, M Kaneko, T Kimoto - Applied Physics Express, 2024 - iopscience.iop.org
Deep levels near the surface of 4H-SiC after dry oxidation were investigated. A large and
broad peak appeared in the low-temperature range of deep level transient spectroscopy …

Low temperature wet-O2 annealing process for enhancement of inversion channel mobility and suppression of Vfb instability on 4H-SiC (0001) Si-face

H Hirai, K Kita - Applied Physics Letters, 2018 - pubs.aip.org
Low temperature wet-O2 annealing process for enhancement of inversion channel mobility and
suppression of Vfb instability on 4H-SiC (0001) Si-face | Applied Physics Letters | AIP Publishing …