Collective Micro‐Optics Technologies for VCSEL Photonic Integration

V Bardinal, T Camps, B Reig, D Barat… - Advances in Optical …, 2011 - Wiley Online Library
We describe the main recent technological approaches that associate micro‐optical
elements to VCSELs in order to control their output beam and to improve their photonic …

Large range dual-axis micro-stage driven by electrostatic comb-drive actuators

M Olfatnia, L Cui, P Chopra… - Journal of Micromechanics …, 2013 - iopscience.iop.org
This paper presents a micro XY stage that employs electrostatic comb-drive actuators and
achieves a bi-directional displacement range greater than 225 µm per motion axis. The …

Fabrication of gapless dual-curvature microlens as a diffuser for a LED package

CT Pan, MF Chen, PJ Cheng, YM Hwang… - Sensors and Actuators A …, 2009 - Elsevier
The light-emitting diode (LED) has been the subject of much interest in the role of a backlight
module for liquid crystal displays (LCDs). However, a traditional LED lamp is a point-light …

Robust free space board-to-board optical interconnect with closed loop MEMS tracking

J Chou, K Yu, D Horsley, B Yoxall, S Mathai, MRT Tan… - Applied Physics A, 2009 - Springer
We present a free-space optical interconnect system capable of dynamic closed-loop optical
alignment using a microlens scanner with a proportional integral and derivative controller …

VCSEL collimation using self-aligned integrated polymer microlenses

C Levallois, V Bardinal, C Vergnenègre… - Micro-Optics …, 2008 - spiedigitallibrary.org
We report on the design and fabrication of polymer microlenses fabricated on patterned SU-
8 layers in view of integrating microlenses on VCSEL arrays for laser beam shaping. For a …

Integrated VCSEL-microlens scanner with large scan range

JB Chou, N Quack, MC Wu - Journal of Microelectromechanical …, 2014 - ieeexplore.ieee.org
We present an integrated beam steering system with a microlens scanner and a vertical
cavity surface-emitting laser (VCSEL) source. The scanner and the VCSEL are assembled …

Electrothermally actuated lens scanner and latching brake for free-space board-to-board optical interconnects

JB Chou, K Yu, MC Wu - Journal of microelectromechanical …, 2012 - ieeexplore.ieee.org
The design, fabrication, and characterization of an electrothermally actuated lens scanner
with bistable mechanical brakes, for the application of free-space board-to-board optical …

Femtosecond laser written embedded diffractive optical elements and their applications

J Choi, M Ramme, T Anderson… - Frontiers in Ultrafast …, 2010 - spiedigitallibrary.org
Femtosecond laser direct writing (FLDW) has been widely employed to create volumetric
structures in transparent materials that are applicable as various photonic devices such as …

Advances in polymer-based optical MEMS fabrication for VCSEL beam shaping

V Bardinal, T Camps, B Reig, S Abada… - IEEE Journal of …, 2014 - ieeexplore.ieee.org
In this paper, we discuss the design, fabrication, and characterization of electrothermally
actuated polymer-based microoptical electromechanical microsystems (MOEMS) for active …

[PDF][PDF] Multiple beam splitter using volumetric<? A3B2 show [pmg: line-break justify=" yes"/]?> multiplexed Fresnel zone<? A3B2 show [pmg: line-break justify=" yes"/] …

J Choi, M Ramme, M Richardson - Optics Letters, 2012 - academia.edu
A simple approach to producing a 1× N beam splitter is demonstrated by fabricating a
volumetric multiplex phase Fresnel zone plate in bulk transparent material. This comprised …