Thin film piezoelectric materials offer a number of advantages in microelectromechanical
systems (MEMS), due to the large motions that can be generated, often with low hysteresis …

This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

MEMS technology and applications have grown at a tremendous pace, while structural
dimensions have grown smaller and smaller, reaching down even to the molecular level …

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental
operational principles of micromachined vibratory rate gyroscopes, and introduces structural …

The design, fabrication and experimental results of lateral-comb-drive actuators for large
displacements at low driving voltages is presented. A comparison of several suspension …

This paper reviews the recent progress in MEMS for radio frequency (RF) applications from
a device perspective. RF MEMS devices reviewed include switches and relays, tunable …

Lumped-parameter electromechanical transducers are examined theoretically with special
regard to their dynamic electromechanical behaviour and equivalent circuits used to …

Surface micromachining has enabled the cofabrication of thin-film micromechanical
structures and CMOS or bipolar/MOS integrated circuits. Using linear, single-axis …

The temperature dependence of the quality factor of microelectromechanical system
(MEMS) resonators is analyzed and measured. For silicon MEMS resonators, there are …

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to
provide the most complete MEMS coverage available. Thoroughly revised and updated the …