Directed self-assembly of block copolymers: a tutorial review of strategies for enabling nanotechnology with soft matter

H Hu, M Gopinadhan, CO Osuji - Soft matter, 2014 - pubs.rsc.org
Self-assembly of soft materials is broadly considered an attractive means of generating
nanoscale structures and patterns over large areas. However, the spontaneous formation of …

Block copolymer nanolithography: translation of molecular level control to nanoscale patterns

J Bang, U Jeong, DY Ryu, TP Russell… - Advanced …, 2009 - Wiley Online Library
Block Copolymer Nanolithography: Translation of Molecular Level Control to Nanoscale Patterns
Page 1 Block Copolymer Nanolithography: Translation of Molecular Level Control to Nanoscale …

Applications of atomic layer deposition to nanofabrication and emerging nanodevices

H Kim, WJ Maeng - Thin solid films, 2009 - Elsevier
Recently, with scaling down of semiconductor devices, need for nanotechnology has
increased enormously. For nanoscale devices especially, each of the layers should be as …

Templated self‐assembly of block copolymers: top‐down helps bottom‐up

JY Cheng, CA Ross, HI Smith… - Advanced Materials, 2006 - Wiley Online Library
One of the key challenges in nanotechnology is to control a self‐assembling system to
create a specific structure. Self‐organizing block copolymers offer a rich variety of periodic …

Directed self-assembly of block copolymers on chemical patterns: A platform for nanofabrication

S Ji, L Wan, CC Liu, PF Nealey - Progress in Polymer Science, 2016 - Elsevier
Directed self-assembly (DSA) of block copolymers (BCPs) on lithographically defined
chemically nanopatterned surfaces (or chemical patterns) combines advantages of …

Polymer self assembly in semiconductor microelectronics

CT Black, R Ruiz, G Breyta, JY Cheng… - IBM Journal of …, 2007 - ieeexplore.ieee.org
We are inspired by the beauty and simplicity of self-organizing materials and the promise
they hold for enabling continued improvements in semiconductor technology. Self assembly …

Assembly of aligned linear metallic patterns on silicon

J Chai, D Wang, X Fan, JM Buriak - Nature Nanotechnology, 2007 - nature.com
In order to harness the potential of block copolymers to produce nanoscale structures that
can be integrated with existing silicon-based technologies, there is a need for compatible …

[HTML][HTML] Block copolymers and conventional lithography

MP Stoykovich, PF Nealey - materials today, 2006 - Elsevier
The lithographic process is arguably the key enabling technology for the digital age.
Hundreds of millions of devices can be fabricated on a single chip because patterns with …

Templating nanoporous polymers with ordered block copolymers

DA Olson, L Chen, MA Hillmyer - Chemistry of Materials, 2008 - ACS Publications
In the midst of this era of nanotechnology and shrinking device size, block copolymers have
evolved from their use in traditional application areas (eg, adhesives, additives, and …

Strategies for inorganic incorporation using neat block copolymer thin films for etch mask function and nanotechnological application

C Cummins, T Ghoshal, JD Holmes… - Advanced …, 2016 - Wiley Online Library
Block copolymers (BCPs) and their directed self‐assembly (DSA) has emerged as a
realizable complementary tool to aid optical patterning of device elements for future …