Block Copolymer Nanolithography: Translation of Molecular Level Control to Nanoscale Patterns Page 1 Block Copolymer Nanolithography: Translation of Molecular Level Control to Nanoscale …
H Kim, WJ Maeng - Thin solid films, 2009 - Elsevier
Recently, with scaling down of semiconductor devices, need for nanotechnology has increased enormously. For nanoscale devices especially, each of the layers should be as …
JY Cheng, CA Ross, HI Smith… - Advanced Materials, 2006 - Wiley Online Library
One of the key challenges in nanotechnology is to control a self‐assembling system to create a specific structure. Self‐organizing block copolymers offer a rich variety of periodic …
Directed self-assembly (DSA) of block copolymers (BCPs) on lithographically defined chemically nanopatterned surfaces (or chemical patterns) combines advantages of …
CT Black, R Ruiz, G Breyta, JY Cheng… - IBM Journal of …, 2007 - ieeexplore.ieee.org
We are inspired by the beauty and simplicity of self-organizing materials and the promise they hold for enabling continued improvements in semiconductor technology. Self assembly …
J Chai, D Wang, X Fan, JM Buriak - Nature Nanotechnology, 2007 - nature.com
In order to harness the potential of block copolymers to produce nanoscale structures that can be integrated with existing silicon-based technologies, there is a need for compatible …
The lithographic process is arguably the key enabling technology for the digital age. Hundreds of millions of devices can be fabricated on a single chip because patterns with …
DA Olson, L Chen, MA Hillmyer - Chemistry of Materials, 2008 - ACS Publications
In the midst of this era of nanotechnology and shrinking device size, block copolymers have evolved from their use in traditional application areas (eg, adhesives, additives, and …
Block copolymers (BCPs) and their directed self‐assembly (DSA) has emerged as a realizable complementary tool to aid optical patterning of device elements for future …