This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

The MEMS gyroscope by means of oven control, or the so-called ovenized MEMS
gyroscope, isolates the die from the external environment and utilizes a closed-loop …

This paper presents a modular and generic micromachined oven-control system for use with
miniature micro-electro-mechanical system (MEMS) transducers. The micro-oven-controlled …

This paper reports a type of highly sensitive temperature sensor utilizing AlN-on-Si
resonators with coupled-beam structures of double-and triple-ended-tuning-fork (D/TETF) …

A mechanically coupled array technique to enable a fully differential operation of single-
crystal silicon thermal-piezoresistive resonators (TPRs) has been demonstrated to alleviate …

Microelectromechanical systems (MEMS) based oscillators have been proposed for use in
coupled arrays for many applications, including neuromorphic computing, clocks with …

In this paper, we summarize research activities and technological progress in the field of
current CMOS-MEMS resonators and oscillators for portable sensor node and timing …

The thermomechanical motion imposes the fundamental noise limit in room-temperature
resonant sensors and oscillators. Due to the inherently low sensitivity of capacitive …

In this paper, the basic concepts of the equivalent model, vibration modes, and conduction
mechanisms of MEMS resonators are described. By reviewing the existing representative …

This work demonstrates, for the first time, ovenization of a fully-encapsulated dual-mode
silicon MEMS resonator operational over a large ambient temperature range. We maintain a …